Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

ISE35 N 25 M L A ARJ AR425 to 935 Digital Pressure Switch Construction Symbol Description ARX Lock pin AMR M3 x 0.5 x 7 (Aluminum materials screw) N Wiring bottom entry ARM Digital pressure switch (Body only) Electrical entry ARP ARP IR-A R Adapter Wiring top entry O-ring Example) Regulator IR Wiring bottom entry O-ring IRV + Wiring top entry Digital pressure switch (Body only) 25 65 NPN

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 l/min (ANR) Condition: Inlet pressure 0.7 MPa Flow Characteristics (Representative values) Pressure Characteristics (Representative values) ARP20(K) ARP20(K) Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150

EX250-SEN_eng

SW1 Input block connector ON 1 Communication connector 0 M3 ground terminal Power supply connector Display Description 1 2 3 4 5 6 7 8 OFF Insufficient power supply for solenoids To obtain the operation manual about this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly.

EX600-SEN3_4_eng

(M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. EtherNet/IPTM communication is not established. Green flashing 4 EtherNet/IPTM communication is established. Green ON NS EtherNet/IPTM communication is time-out. Red flashing Valve plate (EX600-ZMV ) IP address is duplicated. Red ON Safety Instructions (5)Connect the SI unit to the valve manifold.

EX600-SEN7_8eng

(M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. 4 Link, No Activity (100 Mbps) Link, Activity (100 Mbps) Link, No Activity (10 Mbps) Link, Activity (10 Mbps) L/A PORT2 Valve plate (EX600-ZMV#) Refer to the SMC website (URL https://www.smcworld.com) for more information about LED state. Safety Instructions (5)Connect the SI unit to the valve manifold.

EX600-SEC_eng

(M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. Single Flash Safe operational status (Green) ON Operational status 4 OFF No communication error Flash Communication setup error Valve plate (EX600-ZMV ) (Red) Double Flash Communication error (application watchdog timeout) Safety Instructions (5)Connect the SI unit to the valve manifold.

EX600-SPN_eng

(M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. 4 Valve plate (EX600-ZMV ) Safety Instructions (5)Connect the SI unit to the valve manifold. Insert the valve plate into the valve plate mounting groove on the side of the SI unit.

EX600-SPN3_4.eng

For use pollution Degree 3 Environment (UL508) Pollution degree Refer to the SMC website (URL https://www.smcworld.com) for more information about these settings. 10 to 57 Hz constant amplitude 0.75 mm p-p 57 to 150 Hz constant acceleration 49m/s2 2 Vibration resistance Operator for 2 hours each in direction X, Y and Z respectively (De-energized) (3)Connecting the SI unit.

HRX-OM-M090

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and outside between inside and outside kW of installation area of installation area HRS012-AApprox. 2 40 20 HRS018-AApprox. 4 70 40 HRS024-A-20 Approx. 5 90 50 The water-refrigerated thermo-cooler discharges heat

HRX-OM-R016

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and outside between inside and outside kW of installation area of installation area HRS030-A-20 Approx. 6 100 60 The water-refrigerated thermo-cooler discharges heat by using facility water.

HRX-OM-W038

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS040-A-20 Approx.8 120 70 The water-refrigerated thermo-cooler discharges heat by using facility water.

HRX-OM-O021

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS050-A-20 Approx.10 140 70 The water-refrigerated thermo-cooler discharges heat by using facility water.

HRX-OM-R005

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS060-A-20 Approx.12 200 100 The water-refrigerated thermo-cooler discharges heat by using facility water.

HRX-OM-W060

Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150

HRX-OM-Y098

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-20 Approx.18 305 155 HRL200-A-20 Approx.35 590 295 HRL300-A-20 Approx.45 760 380 Installation environment specifications

HRX-OM-X037

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-40 Approx.18 305 155 HRL200-A-40 Approx.35 590 295 HRL300-A-40 Approx.45 760 380 3.2 Installation HRL Series 3-6

Rotary Table

Bolt size for mounting on axial direction Bolt Size Mounting on the top Mounting at bottom Bolt Tap depth When using body tap When using body through hole 1 M30.5 3.5 M40.7 M3 2 3 M50.8 M4 7 M40.7 4.5 Table 6.

MHx-OMZ0003

H 9 - 3-5. () P13P14P15 5 4 M6 85.8L 4 4 4 M3 27 17 10 - 3-6. M8 8 P .18 M8 8 () NPN PIN 1 +24V DC24V 2 3 4 5 ON/OFF 6 ON/OFF 7 8 GND DC0V M8 2 M8 1 11 - 3-7. Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1.

LEF-OM006xx

INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.

JXCx-OMT0005CN

EMG (2)M 24V (1)C 24V 0V(4) DC24V 0V OFF 28 - 32 DC24V M24V EMG () 0V DC24V Ry (1 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (2 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (3 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V 1DC24V M24V EMG 2M24V(SETUP ON) (M24V) 3M24VLK RLS 29 - 7DeviceNet DeviceNet JXCD1 DeviceNet 1 DeviceNet AWG24120.2mm 22.5mm 2 M3