Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Disassembly 1) After loosening the screw q, then if the housing r is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull out the screw q, then remove the gasket or . 3) On the bottom part of the terminal block e, theres a cut-off part (indication of an arrow) .

Possible to transfer a workpiece at low-speed.

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to10 L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol

Slider Type Ball Screw Drive/11-LEFS Series

0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg]

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Maximum transmission distance: 4 m) * This function is not provided with the IO-Link compatible type. 1 unit 2 units 10 units Master Slaves (Max. 10 units) Slave sensors 1 unit 2 units n units (Max. 10 units) Master sensor DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () Blue Gray (Copy wire) Brown Blue Gray (Copy wire) Brown

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

3 Position Cylinder Series RZQ

P2 [MPa] 0.75P1 0.75P1-0.012m 0.75P1-0.0078m 0.75P1-0.0050m 0.75P1-0.0031m 1.5P1-0.024m 1.5P1-0.016m 1.5P1-0.010m 1.5P1-0.0063m Bore size (mm) 32 40 50 63 32 40 50 63 Orientation Circuit Horizontal A Graph 3 10 Line Circuit Orientation Movement Down A r e Extension 2 3 4 5 A Horizontal e r Retraction e Extension A Down Overrun (mm) e Retraction Up C w q Extension 1 B Up e Retraction q P1

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Bernoulli Gripper

0.5 [MPa] 5 0.5 [MPa] 0.4 [MPa] 10 0.4 [MPa] 8 Lifting force [N] Lifting force [N] 0.4 [MPa] Lifting force [N] 4 0.3 [MPa] 8 0.3 [MPa] 0.3 [MPa] 6 0.2 [MPa] 3 6 0.2 [MPa] 0.2 [MPa] 0.1 [MPa] 4 0.1 [MPa] 2 4 0.1 [MPa] 2 1 2 0 0 0 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 1 1.5 0.5 2 2.5 3 Distance from the workpiece [mm] ZNC60m

2–4

Standard without auto switch: 12 and 16; 5 stroke, 25; 5 to 10 stroke Built-in magnet with auto switch: 20; 5 stroke 6 Series CQM Dimensions 32 to 50 2-HA through Auto switch 2-P 2-HB through V KA F Q U 2 x 2-OB counterbore with depth RB 2-N through IB IA EA EB EC M 22 Z 11 Min. lead wire bending radius 10 (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2