AU

1 e + !

AU

1 e + !

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

1.63

2 w @0 r !0 !9 e i !4 !8 @1 !0 t !3 40 or more MGPWL20 to 63 MGPWA20 to 63 !1!6 MGJ JMGP MGP MGPW MGPW 100 stroke or less MGQ 40 or more !7 MGG MGC MGF Over 100 stroke MGZ MGT Component Parts Component Parts No. Description Material Note Ball bushing Spacer Piston seal Rod seal Gasket A Gasket B No.

Wireless System

Forced output mode OFF Wireless master unit is not registered. 16 EX600-W Series Accessories (Optional Parts) y Communication cable with connector u Power supply cable with connector r Seal cap (M8) t Marker w Valve plate r Seal cap (M12) i Power supply cable (7/8 inch connector) e Reinforcing brace (for direct mounting) e Reinforcing brace (for DIN rail mounting) q End plate bracket i Power

VXA21/22

Description Standard Brass Body Valve assembly Piston assembly Piston spring Stainless steel q Stainless steel FPM/EPR Stainless steel, Brass, NBR, Polyacetal w e r Polyacetal/NBR y t O ring Pilot cover NBR Aluminium Stainless steel FPM/EPR 4.1-58 VXA21/22 How to Order VXA22 VXA21 Bracket Model B None With bracket Select a model from the highest operating pressure difference and the characteristic

High Power Cylinder Series RHC

Speed controller Maximum cylinder speed mm/s Composite effective area mm C group 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) D group 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) E group 64.8 to 67 G group 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F group 102.6 to 120 2 Standard type 1 With One-touch fitting Select solenoid valves, speed control

KJ

1 2 KQ2L13-04S 37.5 40 22 Reference dimensions after R thread installation.

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Regulator for 2 MPa ARX 20

A G Dimension table G 1/8 1/4 F 12 14 E 4 6 D 10 12 C 23.8 24.5 B 40.8 44.5 A 37 42 Model G3601 G4602 Specifications G3601 R 1/8 G4602 R 1/4 270 Rolled steel plate (black melamine coated) Polycarbonate Brass 55g 80g Model Piping port size Scale angle Case Installing the Cover After setting the indicator needles, return the cover to its original position by aligning the indentation at the

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

4 y r t !3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

80 or less 180 or less 180 or less 30 or less 60 or less 300 or less 180 or less 0.8 1.4 100 90 20 14 13.2 Response time (1) (ms) VFN Max. operating frequency (c.p.m.) (2) DC AC DC AC 1.6 2.4 300 360 50 60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.

Large Type Vacuum Unit Series ZR

E Vacuum switch ZSE2 + filter Air operated K3 Air operated F Filter C1 N.C. Manual operation C2 Air operated C3 N.O. Nil Non-locking push type C4 Double SOL.

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

Drain Separator for Vacuum Series AMJ 1

w e r e Component Parts No.

DOC1003626

Broken communication wire monitoring time. o r coming 60 sec. off AL34 Communication alarm is generated.

PF-OMM0004_C

[F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

3 Way Direct Acting NVKF 300 Series

1 3 0 s.sll as6 I +s (84) (103) (122) 7.05 I 7.8 8.54 (17e) (198) (217)s.zg lro-oa 1o:g (236) (255) 1274) 1 1 . 5 4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted