Exhaust Cleaner for Clean Rooms AMP Series hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90
4 y r t !3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !
Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.
F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 6 2 IDX-OM-W032 6 6-4 IDFA22E, 37E GFCI R GFGI For Option R L N PE TB ILS V For Option V EVD EDV CM OLR PE C01 C11 PE FM PRS P IDFA55E, 75E GFCI R L N PE CM FM () MC C01 CM C11
locking can be selected Holding an unclamped state Prevents dislocation of home position due to weight of clamp arm Holding a clamped state Prevents work piece slippage and dropping due to work piece weight LOCK LOCK B A B A LOCK LOCK Clamped locking Unclamped locking Compact lock mechanism minimizes extension of length dimension Series CLK1 clamp cylinder with lock Extended dimension mm E
No. q w e r t y u Description Adjusting screw Setting spring Lever Piston Micro switch Bottom cover O-ring Material Rolled steel Rolled steel Rolled steel Polyacetal Aluminum die-cast NBR IN Ex. 3) + u Plug PLC 3. Thread using for the terminal is M3. Only for gasket mounting style Mounting/Piping Dimensions Caution 1. Allow the space required for maintenance.
2 M4f.7 optr-8 1.57 (40) 276 o0) 0.13 (x2l 0.79 (m) 0.79 \20) 6.95 076.5) 'Remove drain cock to obtain 1/4 pipe lhread (220 only) Typical Applications r t l -i-E-:I I I ; | | | ' \t/ H
e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.
When dust enters the valve from the port 3(R), it may cause malfunction. Dimensions VHS400/500 VHS401/501 Air Supply Caution 1. Install an air filter on the inlet side in proximity to the valve. Filtration degree should be 5 m or less. ( ): VHS500 5-8-18
E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled. Error indication (Error code) With the self-diagnosis function given to the Pressure switch, it indicates that there is a failure which could cause a switch failure.
E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled. Error indication (Error code) With the self-diagnosis function given to the Pressure switch, it indicates that there is a failure which could cause a switch failure.
Terms Meaning R The pressure range in which the Pressure switch satisfies the specifications. Values over this range can be set if they are within the set pressure range, but cannot assured the specifications to be satisfied.
E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled. Error indication (Error code) With the self-diagnosis function given to the Pressure switch, it indicates that there is a failure which could cause a switch failure.
Bearing Type: L (Ball Bearing), Mounting: B (Basic Style), Bore Size: 25mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 500mm, Rear Plate: Without Rear Plate, Lock Operation: P [Pneumatic locking (Pressure)]
Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 25mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 500mm, Rear Plate: Without Rear Plate, Lock Operation: P [Pneumatic locking (Pressure)], Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Milt Sepdato{ B -Sracket of --tqe r\,4sxoa ibin Deep 028(55) 'Special order only. 'Special order only Conshaction / Parts List SECTION Parts Lbt Parts ib O6dldtxt Mabfd lvbdd r{AEa50 o Element Assembly' Stahless steel Ai/E{1250 AMEI,SO SECTION * lrcludes OnrE aM gasket. Millinters h Pareoftes NAME Series li&*ntenance OUse wilh dy air mly.
+ 1 () (=)(=) 1 / 43 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) 1 1 1 1 1 1 1 1 1 [F82](54 ) OFF 44 No.LFE*-OMY0008 [F20] 45 No.LFE*-OMY0008 [F22] (5V)(20mA) [F22] [AnA] [AnA][-] OFF ON OFF ON 5V 20mA 10% [V] [V] [V] [V] [L/min] [L/min] [L/min] [L/min] 20L/min( 20L/min( 20L/min( 20L/min( 1 1 1 1-5V 5V 5V 5V ) ) ) ) [F22] 46 No.LFE*-OMY0008 [F30] OFF 2 5 100 24 5 5 100 500
Make sure to connect a speed controller and adjust it to a speed of 500 mm/s or less to operate the cylinder.