XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

High Power Cylinder Series RHC

E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40

IDX-OM-M051

When the IDF100F-30 is provided with options C, R and V and specified to have the facility water piping direction on the right side, the part number will be IDF100F-30-CRVW4. NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Low Maintenance Filter Series FN1

e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

r ITVX IN (Inlet pressure) OUT (Outlet pressure) IN (Inlet pressure) OUT (Outlet pressure) PVQ VEF VEP q q VER e e VEA Figure 2 Backflow Figure 1 Normal VY1 VBA VBAT AP100 When the inlet pressure is higher than the set pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

r ITVH IN (Inlet pressure) OUT (Outlet pressure) IN (Inlet pressure) OUT (Outlet pressure) ITVX PVQ q q VY1 e e VBA VBAT Figure 2 Backflow Figure 1 Normal AP100 When the inlet pressure is higher than the set pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Rotary Table

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth =b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 27 - Kinetic energy Table 9 shows the allowable kinetic energy of the rotary table.

Wireless System

Forced output mode OFF Wireless master unit is not registered. 16 EX600-W Series Accessories (Optional Parts) y Communication cable with connector u Power supply cable with connector r Seal cap (M8) t Marker w Valve plate r Seal cap (M12) i Power supply cable (7/8 inch connector) e Reinforcing brace (for direct mounting) e Reinforcing brace (for DIN rail mounting) q End plate bracket i Power

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

PSE540/560

M5 female thread, through type (With mounting hole) 01 R 1/8 (With M5 female thread) IM5H Note Description Part no. N01 NPT1 /8 (With M5 female thread) ZSM Connector for PSE200 1 pc. ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Hydraulic Cylinders

D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth

NARM Series

Under certain circumstances, the use of an electronic type pressure gauge is recommended. 22 0 0 43.5 58 72.5 87 101.5 Supply pressure (psig) 142 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM1000, 2000 Dimensions Dimensions Symbol A B C D E F G H J K M P Q R Model NARM1000 .18 .98 1.34 .83 .71 2.20 .63 .35 .71 .75 2.05 .35 .45 .19 (4.5) (25) (34) (21) (18) (