AS: AS, Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 01 (1/8"), Option: S (Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9mm, Tubing: 01 (ø1/8"), Seal: S (w/Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9mm, Tubing: 01 (ø1/8"), Seal: S (w/Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 0°, Thread: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D.: 01 (ø1/8"), Seal: S (w/Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 0°, Thread: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D.: 01 (ø1/8"), Seal: S (w/Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 0°, Thread: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D.: 01 (ø1/8")

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1(180°), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D.: 01 (ø1/8")

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

AC Servo Motor Driver (SSCNET /H Type)

1 EDB 2B.2 Encoder counter error 2 EDB -68- Alarm reset Stop CPU reset Power off on Error reset No.

Soft Start-up Valve AV2000/3000/4000/5000 1

gauge G36-10-01 1 MPa Description Part no.

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

D. P. Lube ALD600/900 Series

1 1 1 B P 1 4 1 2 2 1052 D.

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

AMF

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N