MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

PSE3xAC.eng

(The default setting does not include arbitrary display.) 6 Display colour Output ON: Green/ Output OFF: Red (Linked to OUT1) 9 8 8 [F 0] Setting of the switching function of the pressure range, display unit and switch output specifications is completed. 4.5 4.5 [F 2] Setting of OUT2 Same setting as [F 1] OUT1. 28 Press the button between 1 and 3 sec.

CYP

A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3) 0.05 0.05 0.05 0.04 0.04 0.04

CYPSeries

F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)

CYPSeries

F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16:

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V

Refrigerated Air dryer Series IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7

ZSE30/ISE30

voltage: 1 to 5 V 2.5% F.S. or less (With rated pressure range) Linearity: 1% F .S. or less, Output impedance: Approx. 1 k Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Output current: 4 to 20 mA 2.5% F.S. or less (With rated pressure range) Linearity: 1% F

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SYJ3000-22-1 SY114-lll Note white white white Body Piston plate End cover Piston Spool Ass'y y u q w e r t VQZ VQD How to Order Pilot Valve Assembly How to Order Connector Assembly VZS VFS : SY100-30-4ASY114 5 G DC VS : SY100-30-1A100V AC Voltage VS7 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC50/60Hz 200V AC50/60Hz 110V AC50/60Hz [115V AC50/60Hz] 5 6 V S R 1 2 : SY100-30-2A200V AC : SY100-30-

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

3 Port Air Operated Valve

Nil V Standard For vacuum X505 VPA500 series Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF VPA700 series Specifications Fluid Air Type of actuation N.C. or N.O.

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

PF3W7x.eng

[F 3] [ FiL] Digital filter setting [ 1.0] 1.0 s 3 DC(-) Blue 0 V [ dEF] Standard (OUT1 set value displayed) : When a temperature sensor is not connected. 4 OUT1 Black Switch output 1 NOTE The direct current power supply used should be UL approved as follows. Circuit (Class 2) of maximum 30 Vrms (42.4 V peak) or less, with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer.

IDX-OM-W011

T 100 2 () 100 IDF Series 4-1 4 1 IDX-OM-W011 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDF Series 4-2 4 2 IDX-OM-W011 4 30 (2) 30 () O IDF Series 4-2 4 3 IDX-OM-W011 4 1 IDF1E AD37-A AD38-A 1 IDF2E/3E/4E AD48-A 1 IDF6E/8E/11E/15E1 ) 20193 20192SERIAL No.XPAD37 AD38 AD48 SMC WEB IDF-S0001 1 IDF1E/2E/3E/4E IDF-S0002 1 IDF6E/8E/11E/15E1 C32FP-260S 1 IDF1E/2E/3E/4E C42FP-260S 1

Heavy Duty Stopper Cylinder

MIW MIS 40 30 20 3.

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

IDUS/IDFS

/m3. ( ) Therefore, with an air flow rate of 3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/