Series AK1000

(17.5) 2.00 (50.8) 20 0.14 10 0.07 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

50 SUP=0.5MPa SUP=0.5MPa Total lifting range m Total lifting range m 40 40 Air consumption 100l/min (ANR) 30 Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000

Process Pump Series PA3000/5000/PAX1000 Series PB1000

50 SUP=0.5MPa SUP=0.5MPa Total lifting range m Total lifting range m 40 40 Air consumption 100l/min (ANR) 30 Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

PSE550/300

to 50 kPa. 16-3-34 3 Series PSE550 Low Differential Pressure Sensor Analog Output 1 to 5 VDC 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] ZSE ISE 1 4 PSE 0 2 0 2 Differential pressure [kPa] Differential pressure [kPa] Z I SE3 Internal Circuit PS Z I SE1 2 PSE550 Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE550-28 Current output type 4 to 20 mA Allowable load impedance

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

ZSE F/ISE

Set the unit with the or button. : kPa or MPa : kgf/cm2 : bar : psi : inHg : mmHg Note 1) Note 1) Note 1) Calibration is available with series ZSE50 and ZSE60. 16-2-43 20 Series ZSE F/ISE Pressure Switch Precautions Be sure to read before handling. 50 60 50 60 Pressure Source Handling Warning Warning 1. Do not drop, or apply excessive impact (980 m/s2) while handing.

LEKF-OMZ0035

50 Nil Without option H 20 24 30 to to B With lock A 12 16 20 1200 1200 B 6 8 10 *Refet to Applicable Stroke Table.

3 Position Cylinder Series RZQ

A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical

NCQ8

Green LED lights up Indicator light Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) 2.3x 10-4in2 (0.15mm2) x 3 cores (Brown, Black, Blue) 2.8x 10-4in2 (0.18mm2) x 2 cores (Brown, Blue) Note 1) Refer to page 50 for auto switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

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Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Process Pump

30 40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

4/5 Port Air Operated Valve Series SYJA3000

15 20 15 A A A A 5 5 1.5 15.7 (Pitch) P = 10.5 1.5 (Pitch) P = 10.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" M5 x 0.8 (A, B port) 15.7 Station n L1 L2 Station 2 39.5 31.5 Station 20 228.5 220.5 3 50 42 4 60.5 52.5 5 71 63 6 81.5 73.5 7 92 84 8 102.5 94.5 9 113 105 10 123.5 115.5 11 134 126 12 144.5 136.5 13 155 147 14 165.5 157.5 15 176 168 16 186.5 178.5 17 197 189

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.