1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0
P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
D U Applicable Plug Assembly (D-sub connector cable assembly) (Option) Component parts Plug MIL standard D-sub connector D-sub connector Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Cable length 1.5 m 3 m 5 m 8 m Assembly part no. VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7.
(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4
8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting
(C) 15 10 5 15 10 5 15 10 5 15 10 5 15 10 5 1.01 0.72 0.43 1.18 0.84 0.50 1.39 1.00 0.60 1.68 1.20 0.72 2.10 1.50 0.90 25 0.90 0.64 0.39 1.05 0.75 0.45 1.24 0.89 0.53 1.50 1.07 0.64 1.87 1.34 0.80 30 0.84 0.60 0.36 0.98 0.70 0.42 1.16 0.83 0.50 1.40 1.00 0.60 1.75 1.25 0.75 32 0.76 0.54 0.32 0.88 0.63 0.38 1.05 0.75 0.45 1.26 0.90 0.54 1.58 1.13 0.68 35 0.51 0.36 0.21 0.59 0.42 0.25 0.69
or less Double 0 5 79.2 (4.4) VQ52 1 28 or less Rubber seal 25 or less 0 5 61.2 (3.4) VQ53 0 53 or less Metal seal 50 or less Closed center 0 5 63.0 (3.5) VQ53 1 63 or less Rubber seal 60 or less VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50
5-0.03 0 5-0.03 0 24.5 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 10 10 7 7 937
less Double 0 5 79.2 (4.4) VQ52 1 28 or less Rubber seal 25 or less 0 5 61.2 (3.4) VQ53 0 53 or less Metal seal 50 or less Closed center 0 5 63.0 (3.5) VQ53 1 63 or less Rubber seal 60 or less VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or
1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25 IZF10R IZF10R 25 25 20 Air flow level: 1 Discharge time [s] 20 20 Air flow level: 1 Air flow level: 1 Discharge time [s] Discharge time [s] 15 15 15 10 10 10 5 Air flow level: 4 5 5 Air flow level: 4 Air flow level: 4 0 0 300 600 900 1200 0 0 Installation distance [mm
32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8
5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.
end Reverse rotation stroke end (Note 5) LSP 6 LSN 7 10m max.
to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2)
into place in the groove on top of the valve. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Made to Order Specifications (For details, refer to page 1-5-72.) 1-5-4 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Flow Characteristics/Weight Weight (g) Note 3, 4) Flow characteristics Note 2) Effective Port size Type of actuation Valve model area (mm 2) 14/2 (PA/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/25/3
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
25.7 19 12 5 4 9.4 17 20.5 16.2 12 27.2 14 8 6 5 14 17 6.5 5.5 18 22 10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.
(EA), 3 (EB) port] 25 25 25 25 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 43 43 81 81 3 position closed center/exhaust center/pressure center VFA3 40(-P) 02 03 3 4 5 33 28 1/4, 3/8 [4 (A), 2 (B) port] 13 22 1/8 (Pilot port: Upward) 46 81 1 36 20 4A 2B 26.4 35 42 B A 3EB 1P 5EA 2 x 4.3 (For mounting) 8.5 97 1/8 [Pilot port: Lateral (-P)] 64.5 Breathing hole 27 22 13 1/4, 3/8 [1 (P), 5 (EA), 3 (
Using other combinations could lead to burned coils or other malfunctions. 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Digital vacuum switch specifications (D1, D2, D3) Symbol 25 (L) Lead wire length Applicable switch Output specifications NPN output Analog output PNP output NPN output Analog output PNP output Lead wire length 0.6 (3.0) m 26 (L) Lead wire length 0.6 (3.0) m 65 (L) Lead wire