Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.

PF-OMN0009_C

40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

to 4l/min 1.8 to 20l/min 4 to 40l/min 04 20 40 Output for display unit Note 1) + analog output (1 to 5V) Output for display unit Note 1) + analog output (4 to 20mA) Output specifications 1 2 Port size: (inch) Note 1) Output for the display units of PF2D 300/301 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid

SYJA3000

double 2 position double 2 position double 3 position (B) 2 (A) 4 (B) 2 (A) 4 Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single Pilot pressure range (MPa) 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position Ambient and fluid temperature (oc) Max.60 3 position closed center 3 position closed center Lubrication Not required (B) 2 (A) 4 (B) 2 (A) 4 Mounting position Free 300

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

VCA

20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

ZL3-OM00801

No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49 339 300 590 271 561 242 532 213 503 184 474 155 445 126 416 97 387 68 358 39 329 337.5 625 300 587.5 275 562.5 250 537.5 212.5 500 187.5 475 162.5 450 137.5 425 100 387.5 75 362.5 348 635.5 310.5 598 285.5 573 260.5 548 223 510.5 198 485.5 173 460.5

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

0.1 Horizontal mount specification Slider guide Series LJ1 300 Slide screw 0.1 500 0.1 1 0 Ground ball screw 0.02 High rigidity direct acting guide 600 Rolled ball screw 0.05 1 5 0.1 500 Slide screw 20 0.1 300 Slider guide Without brake Ground ball screw 0.02 Rolled ball screw 0.05 500 30 Slide screw 0.1 High rigidity direct acting guide Ground ball screw 0.02 1000

Single Axis Electric Actuator Series LJ1

0.1 Horizontal mount specification Slider guide Series LJ1 300 Slide screw 0.1 500 0.1 1 0 Ground ball screw 0.02 High rigidity direct acting 600 Rolled ball screw 0.05 guide 1 5 0.1 500 Slide screw 20 0.1 300 Slider guide Without brake Ground ball screw 0.02 Rolled ball screw 0.05 500 30 Slide screw 0.1 High rigidity direct acting Ground ball screw 0.02 1000 guide

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Size (Nominal x Length) Quantity Metric size Inch size TMH-23J TMH-01J M3 x 15 TMH-04J TMH-03J TMH-06J TMH-07J M3 x 20 TMH-06 TMH-07 M4 x 25 TMH-08 TMH-09 TMH-10 M4 x 35 TMH-12 TMH-13 1 Series Select the applicable holder/TMH for each speed controller from the table below.

High Vacuum Angle Valve

Temperature distribution of the 120C specification Comparison with a KF25 flange 140 e, r, t 120 eBody 1 Temperature [C] 100 rBody 2 tBody 3 80 q, w 60 40 Heater wBellows 20 qValve 0 0 30 60 90 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Model A1 [mm] B [mm] Weight [kg] Conductance1 [L/s] XLA-16-2 40 108

Speed Controller with

57.8 9.8 21.7 42.9 41.3 21.8 25 12 20.5 17 17.9 AS3002F-09A 5/16" 15.2 13.5 63.8 19 20 AS3002F-11A 3/8" 18.5 16 67.6 21 25 AS4002F-11A 3/8" 18.5 16 4.3 8 18.8 26 74.7 11.3 23.7 51.3 49.7 28 33 14 26.2 21 36.7 AS4002F-13A 1/2" 21.7 20 79.1 22 40.4 1 Reference dimensions 6 AS Series Dimensions DIN Rail Mounting Bracket L-Bracket Bracket on a single side Bracket on a single side AS1002F

HRX-OM-R028

PV SV 20. Select contact output signal 1 function from the table below with [] key or [] key, and confirm by pressing SEL.

IDX-OM-U022

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1

HRX-OM-T004

PV SV 20. Select contact output signal 1 function from the table below with [] key or [] key, and confirm by pressing SEL.

ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle