Thomas Oil-less Articulating Piston Compressor Flow Rate: 1.92 CFM / 54 LPM , 1.92 CFM / 54 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 208 - 230 / 460, Voltage (50 Hz): 190 / 380, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in

Thomas Oil-less Articulating Piston Compressor Flow Rate: 2.4 CFM / 68 LPM , 2.4 CFM / 68 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in / 284 mm Height: 6.95 in / 177 mm

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3

Nozzle Type Ionizer

L1 L2 Number of spacers IZN10E-ES2 37.8 45 4 IZN10E-ES3 55.2 60 6 IZN10E-ES4 72.6 76 8 13 Nozzle Type Ionizer IZN10E Series Functions 1. Maintenance warning Constantly monitors lowered static neutralization performance due to contamination or wear of the emitter. The maintenance LED lights up and maintenance signal is generated. 2.

PFxx-OMJ0005CN

40% 92% 8% 0.525.0 L/min 0.526.3 L/min 026.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.520.0 L/min 0.521.0 L/min 021.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20%

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17

AS-FG/ASD-FG

17 27.8 39.3 12.8 6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5 41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11

MGZ Series

Minimum strokes for mounting of auto switches 40 50 63 Number of auto switches mounted Auto switch type Auto switch models 60 2 pcs. (same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs.

Process Pump

Reference service life (days) = A (reference number of cycles in service life) Operating frequency of solenoid valve (Hz) x Operating time per day (hour) x 60 (min) x 60 (sec) 3. Compressed air with low dew point Using super dry air as the fluid may affect the reliability (service life) of the equipment, because the lubrication characteristics inside the equipment will deteriorate.

VY511, VYU5

When load ratio is 0% (no load), maximum driving speed is 1.2 times and when 75%, it is 0.7 times of these figures. P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling.

E,R.L.

PSI Fanqe Suffix Adder A B NPTF Kt0 0-160 G (STDI 1 . 5 1.375 t6 K12 0-160 G (STD) 1.750 Kr3 0-30 2 1.750 th Kl8 o-60 1.750 U. K19 0-100 1.75 U1 K2e 0-30 1.5 1.375 \b Jet o-60 '1.5 1.375 ls All SMC gaug6 ars scal6d in PsyKgt/cml Precautions N4C5000, 5500, 6000 NAL Series (lnstallation) (Auto Drain) (lnstallation) OFlush piping before installation.

Thomas Oil-less Articulating Piston Compressor Flow Rate: 4.3 CFM / 122 LPM , 4.3 CFM / 122 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 15.3 in / 389 mm Width: 10.2 in / 259 mm Height: 6.91 in / 176 mm

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Applicable FRL Spacer with bracket Y400 VHS4510 AC40 Y500 VHS4510-06 AC40-06 Y600 VHS5510 AC50/55/60 1940 Pressure Relief 3 Port Valve with Locking Hole Series VHS4510/5510 Construction Precautions VHS45105510 r e u Be sure to read before handling.

CRQ2

L L 13 16 22.5 24.5 28.5 Size Screw M4 M4 M6 M8 M8 10 15 20 30 40 11-8-8 9 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Proper Auto Switch Mounting Position at Rotation End Solid state switch Reed switch Rotating angle Size Operating angle ( m) Operating angle ( m) Hysteresis angle Hysteresis angle 75 (41) A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 B 13 22.5 18 30.5 34.5 53.5 45

ITVH

100 0 25 50 75 100 Input signal [% F.S.]

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60

XL-OMV0002

General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60

XL-OMY0002

to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60