Solid State Auto Switch: (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Leakage current 100 A or less at 24 VDC 0.8 mA or less Dimensions Indicator light Red LED lights up when turned ON.
Check wiring Do not mount any switch or relay to power supply line (12 VDC to 24 VDC). Incorrect wiring may cause damage or malfunction of the products. Make sure the wiring is correct before operation. Measurement Caution Caution 1. Separation of signal wires from power wire.
System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%. "HHH" is displayed. 6 (1) Reset applied pressure to a level within the set pressure range. (1) Check if the pressure exceeds the upper limit of the set pressure range.
Incorrect operation of the internal data of the Pressure switch (Er0, Er4, Er6, Er7, Er8, Er9) System error (Er0, Er4, Er6, Er7, Er8 or Er9) is displayed. (2) Check that the power supply voltage is within the range 12 to 24 VDC 10%. (2) Supply a correct voltage of 12 to 24 VDC 10%.
(Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range "HHH" is 6 12 to 30 VDC. displayed. (1) Reset applied pressure to (1) Check if the pressure exceeds the a level within the set pressure range.
Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.
pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.
(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) 100 Nil Without lter F With lter Note) Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port N.C.,
40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100
Ui = 28 V li = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH 52-SY5000 52-SY7000 52-SY9000 Series 10 to 45C (No freezing) Temperature class T6 Ambient and fluid temperature 10 to 50C (No freezing) Temperature class T4, T5 40C less (at rated) Coil temperature rise 24 VDC (system rated voltage) at 1.1 W Barrier input voltage (non hazardous area) 12 VDC at 0.52 W Coil rated voltage
System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%. "HHH" is displayed. 6 (1) Reset applied pressure to a level within the set pressure range. (1) Check if the pressure exceeds the upper limit of the set pressure range.
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specication Applicable to the LEC series 11-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection and page 510 for particle generation characteristics. Refer to page 603-5 for the communication protocols EtherCAT, EtherNet/IP, PROFINET, and DeviceNet.
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection. How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !
Rated voltage 5 6 24 VDC 12 VDC Note) Latching type: 24 VDC only Standard Specifications Standard single type (2W) Large-flow single type (3.2WEnergy saving type) Large-flow latching type (2W) 4 port direct operated poppet valve Air/Inert gas 0.7 MPa 0 MPa / 101.2 kPa Type Item Valve construction Fluid Maximum operating pressure Minimum operating pressure/Vacuum Response time(1) Valve specifications
Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LEFS16, 25, 32, 40 Series LEFS RoHS How to Order LEFS 16 100 B 1 1 S 6N 2 ' . / 4 0 ( + Size 2 Motor type 16 25 32 40 Symbol Type Applicable size Compatible controllers/driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Step motor (Servo/24 VDC) Nil ) ) ) ) Servo motor (24 VDC) A ) ) LECA6
(n = 3, 4, 5n) 40 50 63 40 mm 50 mm 63 mm A B 16.5 mm 19.5 mm 40, 50, 63 50, 63 S n Auto switch Port type Without auto switch, Without switch mounting rod Nil TN Rc NPT Nil Without auto switch, With switch mounting rod P Cylinder stroke Built-in Standard (Strong) Magnet Cylinder Part No. 50, 75, 100, 125, 150 With auto switch, With switch mounting rod Auto switch model None End bracket 1)
light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Made to Order Specifications (For details, refer to page 4-10-8.)
voltage 24 VDC type: 0.12 A or less Power supply voltage 1 2 to 1 5 VDC type: 0.1 8 A or less Input signal Current tvDe Nda2r 4 to 20 mA. 0 to 20 mA (Sink tvoe) Voltage type 0 to 5 VDC. 0 to l0 VDC Presel inDut 4 ooints Current type 250 o or less Voltage type AoDrox. 6.5 kQ Presel inpul ADotox.2.7 ket Straight type Right angle type Inpul impedance H Analog output 1 lo 5 VDC (Load impedance
Problem Problem possible causes Investigation method Countermeasures Check that the power supply voltage is within the range 12 to 24 VDC 10%. Incorrect power supply Supply the correct voltage of 12 to 24 VDC 10%. Check the wiring to the power supply.
Incorrect operation of the internal data of the Pressure switch (Er0, Er4, Er6, Er7, Er8, Er9) System error (Er0, Er4, Er6, Er7, Er8 or Er9) is displayed. (2) Check that the power supply voltage is within the range 12 to 24 VDC 10%. (2) Supply a correct voltage of 12 to 24 VDC 10%.