HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

IDX-OM-W011

.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE

EXxx-OMW0014CN

EX245-DX1 . 13-7 EX245-DX1 No. / SI US1 1 / US1 / / / 2 LED 1 24V3 0V 13.3. EX245-DY1 . 13-8 EX245-DY1 No. SI US2 1 US2 / 2 LED 2/4 3 0V 83 No.EX-OMW0014CN-A 13.4. EX245-LA1/LB1 . 13-9 EX245-LA1/LB1 No.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Refer to page 5-10-13 for Precautions on these products.

High Vacuum Angle Valve, XL Series

Auto switch: Valve side exhaust Heater: Operation principle By applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal (11) and the piston seal (9), overcomes the force of the spring (13), and the valve (15) opens. With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14).

IDX-OM-W053

(1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4. GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

MHK2

M5 x 0.8 (Finger opening port) 22.5 2.3 12-6-13 13 Series MHK2 Dimensions MHK2-20: Standard type 18.6 20 2-M5 x 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 26 +1.2 0 5 16 0.02 13.5 42 30 60 58 32 0 0.2 29 Closed

MHK2

M5 x 0.8 (Finger opening port) 22.5 2.3 12-6-13 13 Series MHK2 Dimensions MHK2-20: Standard type 18.6 20 2-M5 x 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 26 +1.2 0 5 16 0.02 13.5 42 30 60 58 32 0 0.2 29 Closed

Wedge Cam Operation Gripper Series MHK2

Use air gripper within holding force line shown each pressure in effective holding force graph. 13 13 Series MHK2 Wedge Cam Operation Gripper Effective Holding Force: MHK2 Series Double Acting The holding force shown in these tables represents the holding force when all fingers and attachments are in contact with the work. O. D. Holding Force I. D.

Aluminum High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Thermo-chiller

In locations where high frequency occurs 13. In locations where damage is likely to occur due to lightning 14.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

0.5 thread depth 6 (A, B common view) Vacuum suction port 31 Auto switch mounting groove 2 x 4.2 0 9h9-0.036 4.7 1 9.6 2-3 4.7 3 10 19 (35) 32 8 15.5 2 2 8-0.05 0 3-0.02 0 3-0.02 0 13.4 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 12 12 4 4 4 4 934 Rotary Actuated Air Gripper MHR2 1122Without Auto Switch: MHR2-15R 1122B 1122MHR2-15E port location 44 42

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Model Gripping force per finger Gripping force Note 1) Open/ Close stroke (Both sides) mm Bore size mm 10 16 20 25 Note 2) Weight g Model External Internal 60 125 250 455 4 6 10 14 17 40 66 104 9.8 30 42 65 11-MHZ2-10D 11-MHZ2-16D 11-MHZ2-20D 11-MHZ2-25D In-line electrical entry Lead wire type Explanatory drawing L Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Dimensions VP3145-DZA1-X81 (35) Max.10 125.5 87.4 21.5 B A 51 71 80 Manual override (Non-locking) Applicable cable O.D. 4.5 to 7 Pg9 2 x 1/8 (Pilot EXH port) 1/4 (External pilot port) 2 x 8.5 (For mounting) 204.5 195.5 29 PE PA 155 111.5 119 103 93 IN EXH OUT 65 62 42 42 3/8, 1/2, 3/4 (IN, OUT port) 71 36 36 22.6 (Guide) 3/4 (EXH port) In the case of B spec. of -X81 (N.O. spec.), VF3140

CXWM/CXWL

CXWM10-50 CXWM10-75 CXWM10-100 181.5 144 92 52 154 40 63 26 231.5 194 117 77 204 65 88 26 281.5 244 142 102 254 90 113 26 8-26-13 12 Series CXWM 10 Basic Type: CXWM1025 stroke 2 x 2-3.3 through 2 x 2-6.5 counterbore depth 3.2 (4H7 hole pitch) 4H7 depth 3 +0.012 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local