ASR

Note 3) Not used for 10 and 12. 15-16-9 10 Series ASR/ASQ Flow Characteristics Pressure Valve: Series ASR (Inlet pressure: 0.5 MPa) ASR430F ASR530F ASR630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 12 1000 15 300 4 8 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Model: 52 (Top Ported), Connector Type: PH (Flat Ribbon Cable, 10 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), Thread: 00F (G)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Locations: B (Both Sides), Thread: 00F (G)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: 00F (G)

Manifold Type: 20P (Body Ported), Valve Stations: 10 Stations, A, B Port: 00F (G)

Series: 2 (VQZ200), Stations: 10 Stations, Option: D (DIN Rail Mounting), Thread: 00F (G)

Series: 3 (VQ30), Stations: 10 Stations, Option: D (DIN Rail Mounting), Thread: 00F (G3/8)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

to 50C (1) 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 20 Hz 5 Hz Individual EXH Common exhaust Pilot valve EXH Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150/30 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure 12, 24 VDC and 100, 110, 200, 220 VAC Coil rated voltage 10% of rated voltage

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 2 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 3 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 4 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 5 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 6 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 8 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 7 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 9 Stations, A, B Port: G, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 11 Stations, A, B Port: G, Q: Q (CE Marked)