Modular F.R.L. Pressure Control Equipment

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

Pneumatic Transfer System Series MF

508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 32 40 32 40 Rod end threads Female threads Male threads Air 1.5MPa 1.0MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without

EXxx-OMY0006CN

SI SI PROFINET /PROFIsafe EX245-FPS1 M5, FE (= 1.5 Nm) (SCRJ), PROFINET Port1 (XF1) (SCRJ), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , EX245-FPS2 M5, FE (= 1.5 Nm) (RJ45), PROFINET Port1 (XF1) (RJ45), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , Fig. 7-4 (EX245-FPS1/2) 27 No.EX##-OMY0006CN M5, FE (= 1.5 Nm) M12 D code , PROFINET Port1 (XF1)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

x 0.8 M6 x 1 M6 x 1 9 13 13 16 19 23 90 110 121 M6 x 1 M8 x 1.25 M10 x 1.5 5.5 6.6 8.5 53 70 85 9.5 16 15 9 11 14 114 140 170 54 68 84 24.5 28.5 35 5.6 6.8 8.6 18 22 26.5 40.2 50.2 62.7 40.5 50 62 39 49 61.5 53 64 75 14.5 15 20.5 50 60 80 60 80 100 Rc1/8 Rc1/8 Rc1/4 Centralized piping PF PP PG QW Q RR TT TTT VV WWW Model WW XXX Z YH PD PE ZZ (mm) MY1H25 MY1H32 MY1H40 32 42 37.5 15.5 12 14

Free-Mounting Cylinder with Air Cushion Series CU

mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with

3 Port Solenoid Valve SYJ300/500/700 Series

4" one-touch fitting) M5 0.8 1/8 NPTF Port size M5 0.8 A port X port Note1) M5 0.8 M5 0.8 M5 0.8 Body ported type SYJ5 2/SYJ5 2R 3.4 (0.19) Note 2) Valve effective area mm2(Cv) M5 : 3.3 (0.18) 1/8 : 4.8 (0.27) N3T, N7T: 3.8 (0.21) Base mounted type SYJ5 4/SYJ5 4R M5 : 3.8 (0.21) 1/8 : 4.7 (0.26) Note 1 : Only for external pilot Note 2 : Value when used on a manifold Proper Combinations of

125

Air operated: VEX3420 A B VEX VEX 3 R 1 P Manual override 87.7 127.6 Max. 10 Pg7 Applicable cable O.D. 3.5 to 7 P2 P1 103.7 96.2 14 84.9 M5 (Port PE/ Pilot exhaust) A 2 79 75.5 M5 (Port P1, P2/ Pilot air) 85 1733 3 Port 3 Position Valve/VEX3 Series Manifold Specifications Specifications Model VVEX2 VVEX4 Applicable valve VEX3220, VEX3222 VEX3420, VEX3422 Valve stations Note) 2 to 8 stations

ZSE30A(F)/ISE30A

12 ISA2 ISE35 PSE C4H C6H N7H IS One-touch fitting 4 mm 5/32 inch straight One-touch fitting 6 mm straight One-touch fitting 1/4 inch straight ISG 18 21.8 17.6 ZSM1 10.3 9.8 14 10 14 14 10.9 10.9 10.9 C4L C6L N7L One-touch fitting 4 mm 5/32 inch elbow One-touch fitting 6 mm elbow One-touch fitting 1/4 inch elbow 20.7 22.9 23.5 15.6 16.1 16.1 9.3 11.6 12 10.9 10.9 10.9 37 ZSE30A(F)/ISE30A

VZS

Manifold solenoid valve: 32 stations (512 point) max. Maintenance and inspection are easy. With control unit Plug-in type/Non plug-in type Filter, regulation valve, pressure switch and air release valve all combine to form one unit. Piping processes are eliminated.

VK3000

Caution Corresponding mark (Concave part) Corresponding mark (Concave part) Mounting Screw Tightening Torques M3: 0.6 Nm 1422 VK3000 Series 5 Port Solenoid Valve Direct Operated Poppet Type Dimensions: Body Ported Grommet: VK3120-G-M5 Port size: M5 DIN terminal: VK3120-D-M5 2 x 3.2 (Manifold mounting hole) 74.1 Max.10 14 9 (Bracket) 5 x M5 x 0.8 (Piping port) 4A 4A 2B 13 4 2B 2 x 3.2 (Lead

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Information

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

High Power Cylinder Series RHC

14.5 9 20.5 29.5 30 27 25 25 15 17.5 12 18 12.5 16 10.5 19.5 14 14.5 9 20.5 33 33.5 30.5 32 32 15 19.5 12 20 12.5 18 10.5 21.5 14 16.5 9 22.5 37.5 38 35 40 40 20 24.5 17 25 17.5 23 15.5 26.5 19 21.5 14 27.5 43 43.5 40.5 50 50 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 50.5 50.5 47.5 63 63 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 59 80 80 30.5 16.5 29 15 27.5 13.5 69.5 100

Bernoulli Gripper

(Japanese Ministry of Health and Welfare Notification No. 370, 1959) 10 ZNC Series Dimensions: 20 (Without mounting plate) Basic type 16.5 M5 x 0.8 thread depth 3.7 Multi-port3, 4, 5 11.8 2 x M2.5 thread depth 4.2 45 35 Counterbore diameter 8.5, depth 0.8 6.5 11.3 20 14 6.2 With a plug attached: 2.2 With a plug attached: 2.2 M5 x 0.8 thread depth 3.7 Air supply port PB1, 2, 5 2 x M3 x 0.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

(Plug: M-5P) 4.2 25 24 8.5 3 0 +0.030 depth 3 A 3 0 +0.030depth 3 1.5 19 220.05 4-M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum suction port M5 x 0.8 Piping port 2-M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA Mounting base side B D +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth

KK/KK13

/O.D. mm Model L 5/8 21.4 14 14 36.1 12.7 13.7 4.5 KK3P-50N 1/8 6/9 38.8 18.3 5.4 -60N 18.4 17 39.9 16.5 6.5/10 35.9 21.9 5.9 -65N 14 43.9 13.7 5/8 34.7 17 12.7 4.5 KK4P-50N 6/9 48.4 18.3 5.4 -60N 17 46.7 16.5 1/4 6.5/10 45.1 21.9 5.9 -65N 25.2 8/12 53.2 34.4 7.4 -80N 47.6 55.6 38.2 8.5/12.5 7.8 -85N 19 17.4 19 60.5 34.4 8/12 7.4 KK6P-80N 53.4 1/2 62.8 38.2 8.5/12.5 7.8 -85N 31 24 57.2 20.1

CXT

D-F7NWV D-F7BWV Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard stroke 32 40 9 13 6 8.5 31.5 35 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9.5 13.5 7 9.5 38.5 42 6.5 9 6.5 9 38.5 42 38 41.5 6.5 10.5 10 14 Bore size (mm) Long stroke 32 40 9.5 13 17.5 23.5 31.5 35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 10.5 14 18.5 24.5 38.5 42 10 13.5 10 13.5 18 24 18 24