VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

7ND9071en

L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5

3

Chromium molybdenum steel Stainless steel NBR Carbon tool steel Phosphor bronze Stainless steel Rolled steel Carbon tool steel Hexagon socket head set screw Guide pin O-ring Chromium molybdenum steel Rolled steel Rolled steel Round R-type retaining ring Coil scraper Scraper pressure Head cover C-type retaining ring Except 12, 16 Except 12, 16 Except 12, 16 Electroless nickel plated 20 to

SMC

16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143 MXS Air slide table 1322Dimensions / MXS16 1322Axial piping (16) MXS16-P 132253.3 Maximum 6.5 Operating port 2-M5 x 0.8 26 12 23.5 12 Other dimensions are the same

CRB2/CRBU2/CRB1

12 113 12.7 127 16 13 133 16.1 204 Required Air Capacity Required air capacity is the volume of air that is required to operate the rotary actuator at a certain speed.

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Compact Cylinder

Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123 1.0 12 50 127 137

JXCx-OMU0004

No.JXC-OMU0004-A (DC24V) / LECP1 Series 1. . 4 2. . 6 2.1 . 6 2.2 . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4ON . 10 5(). 10 6 . 10 3. . 11 3.1 . 11 3.2 . 12 3.3 . 13 3.4 . 14 1 . 14 2 . 14 3 . 15 4. . 16 4.1 CN1 . 16 4.2 CN2CN3: . 16 4.3 CN4I/O . 16 5. CN . 17 5.1 . 17 5.2 . 17 (1) . 17 (2) . 18 (3) . 18 6.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

13.2 30.1 21.5 40 14.2 16 AS231FSG1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FSG1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FSG1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FSG1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FSG1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FSG1-02-09 (S) 5/16 13.2 37.1 23.5 59.9 14.2 50

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 Model F 35 35 35 40 30 55 65 70 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 789 MXS 1322Air Slide Table Dimensions: MXS16 1322Axial piping (16) MXS16-P 1322Air Preparation Equipment Pressure Control Equipment

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

CNS

NT-12 NT-16 125, 140 160 M30 x 1.5 18 46 53.1 44 M36 x 1.5 21 55 63.5 53 D C H B 9-8-19 20 Series CNS Accessory Bracket Dimensions Single/Double Knuckle Joint Mounting H A Applicable knuckle joint part no.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Weights (g) 10 16 Bore size (mm) Standard weight 52 96 Additional weight per 15mm of stroke 4 6.5 Axial foot type 22 22 Mounting bracket weight Front flange type 16 16 Double clevis type (with pin) 6 16 The mounting nut and rod end nut are included in the basic weight. The mounting nut is not included with the double clevis type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.030 4 20 0 0.030 4 15 2-M5 x 0.8 Connection port for side port 9 4.5 1 CRB2BW40-SE/DE 10 g6 -0.005 -0.014 0 -0.052 25h9 20 A port B port 63 2-M5 x 0.8 Connection port for axial port 21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch

Table of Contents

21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch unit) Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch unit) Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

Serial Transmission System Series EX250 Series EX500

layout (Up to 16 solenoids possible.) 16 16 stations Nil S R RS Internal pilot specification Internal pilot/Built-in silencer External pilot specification External pilot/Built-in silencer Note 1) Double wiring specification: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations.