Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: M5X0.8

3 Port Solenoid Valve Metal Seal Series VZ200 1

With light/surge voltage suppressor With light/surge voltage suppressor 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 61.4 R side 2-M5 x 0.8 38 19 PE 2-5.3 mounting hole 4.4 10 2-M5 x 0.8 L side Max.10 91 23 18 (Lead wire length) Manual override (Non-locking) 300 300 2-M5 x 0.8 300 (Lead wire length) (Lead wire length) 92 84.3 Stations n: Stations Formula L1 = 19n + 12 L2 = 19n + 40 2 50 78 3 69 97

End Lock Cylinder Series CBG1

, 50, 63 10 3 Thread tolerance JIS class 2 M5 x 0.8 x 40 or more 80, 100 24.5 3 Cushion Remove the bolt during normal operation.

Clean Gas Filter

Flow rate L/min (ANR) SFB20-02 0.1 Inlet pressure Max. flow rate line 0.3 MPa Pressure drop MPa 0.1 MPa 0.01 0.7 MPa 0.5 MPa 0.001 0.0001 1000 10 100 Flow rate L/min (ANR) 304 SFB100/200 Series Clean Gas Filter/Clean Gas Strainer: Cartridge Type/Straight Type Dimensions SFB100/200: Rc 1/4 SFB101/201: NPT 1/4 SFB104: M5 HAA HAW Bracket 2 x M5, Rc 1/4, NPT 1/4 AT IDF IDU 24 40 50 IN IDF FS

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Series AK1000

0.34 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

3 Position Cylinder Series RZQ

Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW 112.5 82.5 10 102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 836 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP16 11223 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2 x M5 x 0.8 depth 8 Stroke: S 2 x M4 x 0.7 depth 6 11-/22-MXP16-20 A 4 x M5 x 0.8 depth 7 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port H Width across flats 8

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base

3 Port Solenoid Valve SYJ300/500/700 Series

4" one-touch fitting) M5 0.8 1/8 NPTF Port size M5 0.8 A port X port Note1) M5 0.8 M5 0.8 M5 0.8 Body ported type SYJ5 2/SYJ5 2R 3.4 (0.19) Note 2) Valve effective area mm2(Cv) M5 : 3.3 (0.18) 1/8 : 4.8 (0.27) N3T, N7T: 3.8 (0.21) Base mounted type SYJ5 4/SYJ5 4R M5 : 3.8 (0.21) 1/8 : 4.7 (0.26) Note 1 : Only for external pilot Note 2 : Value when used on a manifold Proper Combinations of

VQ5000

Indicate 10 to 12 stations on the manifold specification sheet.) One station is used for serial unit mounting.

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

SYA3000/5000/7000

, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8, N9 C10, N11 96.2 76.2 2 x M5 x 0.8 (Pilot port) 13.6 B A 2 x 4.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 42 (66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 (49.5) (42.5) SYA7220

Title not found

,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)