Series AS-FM/AS-M/ASD-FM

11.4 12 8.4 9.3 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 7 28.7 17.5 12.7 28.8 33.8 8 10-32UNF 9.3 9.6 25.1 30.1 10.8 34.5 31.9 23.3 20.7 16.5 13.7 8 17 17.5 9.3 13.1 12.7 31.8 18 31.1 36.1 23.9 25.6 28.2 21.9 23.9 25.6 28.2 31 NPT1/8 12.7 14.2 10.9 27.1 32.1 14 16.5 18.5 21 16 17 18.5 19 21 32 33 36 39 40 37.2 41.7 40.1 42.6 45.6 48.4 47 12.9 16.2 10.9 16.2 35.4 40.4 NPT1/4 17.5 18.5 29.4

4/5 Port Air Operated Valve Series SYJA3000 1

46.5 Manual override 33.5 (Piping port) M5 x 0.8 21.5 2-1.8 (Bleed port) With fiflter (80 mesh) (Piping port) 6 6 21 32 24 15 R1 P 17 17 8.5 R2 45.5 2-1.8 (Bleed port) With fiflter (80 mesh) 5-2-24 7 4/5 Port Air Operated Valve Series SYJA7000 How to Order SA A, B port size Bracket VA One-touch fitting for 8 C8 One-touch fitting for 6 1/8 C6 01 With bracket F Nil Without bracket SA VA VM

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

CP95

8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51 233 320 114 89 32 5 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L,

CP95

13 M6 x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14

MHF2

Note 1) Refer to page 21 for solid state switch common specifications. Note 2) Refer to page 21 for lead wire length.

High Power Cylinder Series RHC

51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6

NCA1

3/4 1.125 1/4 5/8 1 15/16 4 1/8 2 3/8 5 1/2 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 1/8 2 3/8 5 7/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 4 1/8 2 3/8 6 1/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 4 7/8 2 5/8 6 7/8 3 1/4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 7 1/8 4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 4 7/8 2 5/8 6 7/8 4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 7 1/8 5 1 3/4-16 1 1

Air Cylinder NCA1 Series

3/4 1.125 1/4 5/8 1 15/16 4 1/8 2 3/8 5 1/2 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 1/8 2 3/8 5 7/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 4 1/8 2 3/8 6 1/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 4 7/8 2 5/8 6 7/8 3 1/4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 7 1/8 4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 4 7/8 2 5/8 6 7/8 4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 7 1/8 5 1 3/4-16 1 1

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

4/5 Port Air Operated Valve SYJA3000 Series

B port size Bracket One-touch fitting for 8 C8 One-touch fitting for 6 1/8 C6 01 With bracket F Nil Without bracket *The bracket is not mounted.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) 100 120 125 130 15 25 105 140 30 D-F5NT 100 + 55 (n 4)/2 n = 4, 8, 12, 16 120 + 55 (n 4)/2 n = 4, 8, 12, 16 125 + 55 (n 4)/2 n = 4, 8, 12, 16 130 + 55 (n 4)/2 n = 4, 8, 12, 16 15 + 55 (n 2)/2 n = 2, 4, 6, 8 25 + 55 (n 2)/2 n = 2, 4, 6, 8 105 + 55 (n 4)/2 n = 4, 8, 12, 16 140 + 55 (n 4)/2 n = 4, 8, 12, 16 30 + 55 (n 2)/2 n = 2, 4, 6, 8 With n pcs

HRX-OM-X071

Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-3 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.2.4 Inspection every 6 months . 8-8 8.3 Stop for a Long Time . 8-9 8.3.1 Discharge of the circulating fluid . 8-9 8.3.2 Discharge of the facility

EXxx-OMN0035CN

(25 ) 8 8 F (32 ) 8 8 P PNP N NPN EX600-DME No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () -46No.EX-OMN0035CN-A EX600-DMF No. 1 LED 2 () 3 4 5 () -47No.EX-OMN0035CN-A (1)EX600-DME EX600-DMPE EX600-DMNE 1 0 2 1 3 2 4 3 5 4 6 5 7 6 8 7 9 24 V() 10 24 V() 11 0 V() 12 0 V() 13 FE 14 0 15 1 16 2 17 3 18 4 19 5 20 6 21 7 22 0 V() 24 V() 23 0 V() 24 V() 24 0 V() 24 V() 25

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

11.4 12 8.4 9.3 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 7 28.7 17.5 9.6 12.7 33.8 28.8 8 9.3 10-32 UNF 30.1 25.1 10.8 34.5 31.9 23.3 20.7 16.5 13.7 8 17 17.5 9.3 13.1 12.7 31.8 18 36.1 31.1 12.7 NPT 1/8 14.2 32.1 27.1 23.9 25.6 28.2 21.9 23.9 25.6 28.2 31 10.9 16.5 18.5 21 16 17 18.5 14 19 21 32 33 36 39 40 Reference dimensions of 10-32 UNF and NPT threads after installation. 37.2 41.7

Sine Cylinder Series REC

47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181

Sine Cylinder Series REC

47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181

CLS

8 !

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle