SMC Corporation of America
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Hard anodized Chromated Countersunk head screw Nut Rod seal Piston seal Gasket Plug Nickel plating Nickel plating Zinc chromated D-X 23 MXH Series Dimensions: 6 LT 9 15 LA LB 8 J x M3 x 0.5 Depth 5 3 x M4 x 0.7 through Pilot hole dia 3.3 2 x 3 x 6 counterbore depth 3.3 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 4 x M3 x 0.5 Depth 5.5 2 x M5 x 0.8 Cylinder port 4 x M3 x 0.5 Depth

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Note Applicable Auto Switches Bore sizes (mm) Reed Switches Solid State Switches Switch mounting screw (M3 x 0.5 x 8l) Square nut DA7, DA80 DA73C, DA80C DA7H, DA80H DA79W DF7, DJ79 DF7V, DJ79C DF7W, DJ79W DF7WV, DF7BA DF7F, DF7NTL 20 BQ 1 Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut 32, 40, 50 63, 80, 100 BQ 2 [Stainless Steel Mounting Screw Kit] The following

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

Max. load mass Review M1, M2, M3. M max is the allowable moment. 2 = M/M max 2. Static moment Review Me1, Me3. Me max is the allowable moment. 3 = Me/Me max 3.

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without an unit switching function.)

(Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is 5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls.

2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDF Series 2 4 IDX-OM-W011 2 2 3 ()2 2 2-2-3 4 2-3 IDF Series 2 5 IDX-DM-W011 3 3 1 IDF4E15E1 ` 3 2 ON IDF1E3E IDF4E15E1 5 0.15MPa (IDF1E ) 3-1 IDF Series 3 1 IDX-DM-W011 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 3-3 IDF Series 3 2 IDX-OM-W011 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE: LN: LN PE: PE: PE: M3 6.5mm M3 2 1.25mm 6.5mm 2 1.25mm () () 13-5 3 5-2 IDF55E/75E

VCHC AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 ASS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

0 M3 x 28l Stainless steel Hex. socket head cap screw with spring washer Exhaust throttle with silencer ASN2-M5 !1 @8 M3 x 10l Port size: 6 Stainless steel Hex. socket head cap screw with spring washer One-touch fitting @9 !2 Aluminum alloy Plate Metallic painted !3 Replacement Parts Aluminum alloy Sub-plate Metallic painted !4 Refer to the How to order below.

M3 x 0.5 6 2. The product performance of the Bernoulli gripper varies greatly depending on the type of workpiece.

0 M3 x 28l Stainless steel Hex. socket head cap screw with spring washer Exhaust throttle with silencer ASN2-M5 @8 !1 M3 x 10l Port size: 6 Stainless steel Hex. socket head cap screw with spring washer One-touch fitting @9 !2 Aluminum alloy Plate Metallic painted !3 Replacement Parts Aluminum alloy Sub-plate Metallic painted !4 Refer to the How to order below.

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

CLKG CKQ CLKQ Auto switch mounting screw CK CLK CKQ Hexagon socket head cap screw (Included with auto switch) (M2.5 x 12L) t Tighten the auto switch mounting screw (M3) to fix the auto switch. The tightening torque of the M3 screw must be 0.35 to 0.45 Nm. t The detection position can be changed under the conditions in step e.

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.