DOC1020530

Command bit setting of Controlword Bit 3 Bit 1 Command Transition No. Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

A

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PA PP 1(P) 2 2(A) 1 1/2 PP = approx.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

Soft Start-up Valve AV2000/3000/4000/5000 1

gauge G36-10-01 1 MPa Description Part no.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

min. 1 (between case and cable) 1000V AC for 1 min.

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

ARX Series

1 ARX20 mm Nil F ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

Vacuum Ejector with Solid State Timer

Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead wire length 3m Without lead wires C CL CN Switch type Body type Without 1 point setting/analog output 3 rotations, NPN output T14 For single type Common SUP for manifold Individual SUP for manifold 1 3 5 Without 1 point setting

Vacuum Ejector with Solid State Timer, Series ZMA

length 3m Without lead wires C CL CN Switch type Body type Without 1 point setting/analog output 3 rotations, NPN output T14 For single type Common SUP for manifold Individual SUP for manifold 1 3 5 Without 1 point setting/analog output 3 rotations, PNP output T54 Rated voltage Standard supply pressure 5 24VDC 0.5MPa 0.35MPa 0.45MPa H M S Valve K Air supply valve/Vacuum release valve Thread

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: N (NPT), Port Size: 01 (1/8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: N (NPT), Port Size: 01 (1/8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: 01 (1/8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: 01 (1/8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8), Sealant: S (with Sealant)

Body Size: 2 (1/8, 1/4), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 01 (ø1/8)