Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

39

M N O P Q J K L M N O P Q Part no.

Cylinder with Lock Series CNS

hole BC element FA T GL GR Rc(PT) BP Unlocking port G G Width across flats KA MM R1 Q V TD e8 D EA E TY VA BN AL A K F C B TX TZ N N TT M H S + Stroke ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J K KA 125 140 160 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 and 2 L ranges.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Fluoropolymer Piping Equipment

Connection threads Rc/NPT E E H L L M Min. port size W Y L, L H W M LQ3H11-F 4 1/8" 10 9 11 35 34 14 2.5 10 18.5 LQ3H12-F 3 2 LQ3H21-F 6 1/8" 17 16 16 40 39 20 4 14 18.5 LQ3H22-F 1/4" 45 44 21.5 LQ3H31-F 10 1/8" Y (E, E) 7.5 18.5 LQ3H32-F 8 6.4 LQ3H33-F 10 1/4" 55 52 7.5 21.5 LQ3H34-F 8 6.4 LQ3H35-F 10 3/8" 55.5 52.5 7.5 25 LQ3H36-F 8 6.4 LQ3H41-F 12 1/4" 24 22 24 55.5 53 29 9.5 22 21.5 LQ3H42

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

High Purity Fluoropolymer

E W Y H M L 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 10 1/8" 26.5 18.5 1/8" 35 16.5 14 15 14 21.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H L M E W Y LQ 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 1/8" 10 26.5 LVN 18.5 1/8" 35 TI/ TIL 16.5

Cylinder with Lock Series MNB

Nil 1 pc. S Mounting bracket n pcs. n B Basic type Type of auto switch L Axial foot type F Front flange type Nil Without auto switch G Rear flange type Select the applicable auto switch type from the table below.

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

Profile Design ISO/VDMA Air Cylinder Series CP95

0.3 F (front) 0.4 0.5 0.6 0.7 0.8 0.9 1 *) *) *) *) *) *) 0.2 G (rear) 0.3 1160 1360 0.4 940 1160 1350 0.5 1080 830 1020 1190 0.6 770 980 750 920 1080 0.7 700 900 680 850 990 0.8 650 830 630 780 910 0.9 610 790 590 740 860 1 *) 580 740 560 690 810 L F (front) F (rear) L 0.2 0.3 F (front) 0 .4 0.5 0.6 0.7 0.8 0.9 1 *) *) *) *) *) *) G (rear) 0.2 0.3 0.4 0.5 0.6 1010 1380 0.7 1020

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) Cable length (L) [m] 1 2 1 1.5 3 3 5 5 8 8*1 A 10*1 B 15*1 C 20*1 15 16 Connector B Connector D (14.7) (30.7) L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C Actuator side (Terminal no.)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: W (Grommet / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread

V

S TA N D A R D T Y P E F O R E X T E R N A L P I L O T T Y P E A S S TA N D A R D S P O O L 0 Metal 1 Rubber Courtesy of Steven Engineering, Inc. !

NAAMS Standards Compliant

250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 [mm] [mm] Model NAAMS code A B C D E F G H I J Model NAAMS code A B C D E F G H I J CKZ-63A031 ACA031M 125.0 110.0 95.0 80.0 65.0 CKZ-63A032 ACA032M 155.0 140.0 125.0 110.0 95.0 80.0 65.0 CKZ-63A033 ACA033M 185.0 170.0 155.0

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

DA N YC Y 1/8 NPTF F NN mounting nut LB + Stroke KK UNF-2A NN mounting nut L For 1 1/2 bore cylinder YC No bumper Bumper Bore size (in) MM KK A B BC DA E F K G L N NN Y YC W LB ZB LB ZB 075 (3/4") 0.250 1/4-28 0.50 0.624 0.624 0.25 0.86 0.38 0.251 0.25 0.34 0.75 5/8-18 0.75 1.20 0.62 4.00 4.28 4.00 4.28 088 (7/8") 0.250 1/4-28 0.50 0.624 0.624 0.25 0.93 0.38 0.251 0.25 0.34 0.75 5/8-18 0.75