High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

10

Absorbed Energy Max. absorbed energy (J) Collision speed (m/s) Model 1 2 3 4 5 10 20 30 40 50 60 70 80 Soft type RJ0604 0.05 to 1 0.5 H : 0.05 to 2/L : 0.05 to 1 RJ0806H/L 1 H : 0.05 to 2/L : 0.05 to 1 RJ1007H/L 3 H : 0.05 to 2/L : 0.05 to 1 RJ1412H/L 10 H : 0.05 to 2/L : 0.05 to 1 RJ2015H/L 30 H : 0.05 to 1.5/L : 0.05 to 1 RJ2725H/L 70 Short stroke type RJ0805 0.05 to 1 0.5 RJ1006 0.05 to

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

FSQ seies

Bst resPonss Posilron Solid state switch o o.F^)F O-F/LF D-F/NTL o @ Lalch type diaqnoslc outpul Diagnostic outpul OUT 2 J . Solid slate and Reed switches are nterchangeable {Reed swilch} {So id slate swlich} D.F79 D-J79 +.-D-A7 D J79C Series RSDO Auto switch hysteresis "onO", ** (oN) f ' = =mPBasic wiring 3 wire system PNP 2 wire system 3 wire syslem NPN : t c=_ . ---'-+-Ikti#?

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

C95Series

please see pg. 15 o.,noaas ~(2 ""\Of~) W ~ l00V, 200V ~ 24V 5V,12V 3---e{NPNJ tC circuit ~ , FIP 3-Yr11re(PNP) J51 1'" l 00V,2QOV 2-wire l ~ 12V 3liWe (NPN) I F&8W 5V,12V IC I' FS. 3'1'111"(1 (PNP) Circuit Relay * Lead Wlre lenglh C.5m ...

LEY-OM007

ON/OFF / / 2 3 3 2 1 2 / 3 4.3. [] LEC -20- LEC / P.38 6.3 <> NPNPNP LEY16B-100 NPN <> INPIN []INP ON ON INP ON OFF ,[] [] / P.41 7.2 -21- <> No.1 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 60 40 30 100 48.00 50.00 20.00 1 ABS 250 0.00 3000 3000 0 0 1 100 0.00 2.00 0.50 a <> ABSINC ABS()/ / INC()/ / b c d e f 0

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CY1 MY1 3.4-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto switch Without auto

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

HRL

Conversion factor: kcal/h to kW : 860 [(cal/h)/W] * Refer to the following for the typical physical property values by circulating fluid.

SV

Branch crimped connectors 1-2-47 44 Series SV Type H NKE Corporation Uni-wire H System Type V Mitsubishi Electric Corporation CC-LINK System Type U JEMANET (JPCN-1) B RATE STATION NO. 4632 4632 4632 1 1 1 9 9 9 PW LRUN DIP.SW ADDRESS 2 2 2 8 8 8 Name of terminal block, LED Note Cable wiring 3 3 ON POWER ALARM COMM 3 7 7 7 1 4 4 4 ON 6 6 6 O N SD RD LERR. 5 5 5 x 10 x 1 4632 POWER SEND 1 2

VQ5000

Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550

asilltr

1Vt 1 % 2% 3 4 v3 3l t h a 1 % z 2y, 3 Series NCQT D Aulo-swiich capable Switches (see page 16) Type of Aulo Switch (Rail Mounted) Wiiilut Auto witch : Female Rod (Stid.)

Wedge Cam Operation Gripper Series MHK2

Holding MHK series MHKL series MHK series MHKL series H H H H L Holding point Holding point Holding point Holding point L L L L: Distance to the holding point H: Overhanging distance Proper holding points should be selected in accordance with the operating pressure.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

Transfer

B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

Wedge Cam Operation Provides

F = one finger thrust.

CQS

3 20 20 CQSB20-S-PS CQSB20-T-PS 25 25 CQSB25-S-PS CQSB25-T-PS Seal kit includes !3. Order the seal kit, based on each bore size. Seal kit includes !2, !3, !4.

MHK2

3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !