The pressure switch offers dual unit representation in MPa and PSI. 14-4-36 19 Series ARM11A/B Compact Manifold Regulator Common/Individual Supply Type DIN Rail When only DIN rail is required: DIN rail part no. AXT100DR n Note) Put an appropriate No. from the table below in the place of n. For the L dimension, please refer to Dimensions.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 x 7.2(= 21.6) Black 7 3 Load 8-M3 ZSP 36 +0.5 0 6.4 Brown 6 2 + Blue ISA2 5 1 12 to 24 VDC 1 2 3 4 IS Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white wire of the sensor to .
41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33 39.5 26 31 35 43 23.5 27 39.5 43.5 57.5 65.5 35 41 26.5 29 41.5 48 50 55 VV2CA3 VV2CA4 17-2-17 12 Series VCA Manifold Exploded View Series VCA20 Manifold body Gasket q w Manifold base A port side Mount it as shown above.
Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.
Refer to p.0-33 to 0-36 for Safety lnstructions and common precautions. Caution Warning How to Use L and M Plug Connector Manual Override Without an electric signal for the solenoid valve the manual override is used for switching the main valve.
36 38 G 15 15 15 17 15 25 35 HA 40 40 40 25 36 72 76 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111 M 71 71 71 83 103 149 203 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202 MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 26.5 36.5 46.5 56.5 66.5 91.5 116.5 SMXS12A, #4(#1+#4) SMXS12A, #5(#2+#5) SMXS12A, #6(#3+#6+#7) SMXS12B, #4(#1+#4) SMXS12B, #5(#2+#5)
-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FSG1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FSG1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FSG1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FSG1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FSG1-02-09 (S) 5/16 13.2 37.1 23.5 59.9 14.2 50 AS331FSG1-02-11 (S) 3/8 15.9 17.4
(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.
Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.
Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.
18 36 M12 x 1 M12 x 1 M12 x 1 Vertical 36 Width across flat 14 Vertical Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 10 5 15 10 5 15 10 5 15 Lateral Lateral 2 2 2 With Adapter: Vacuum Inlet 17 16 11.4 1.8 13 8.4 1.8 11 10 6 1.8 With Adapter: Vacuum Inlet 14 Lateral With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-T10B
With switch unit + Auto switch R73, Rotation 180, Side port location MDSUB20-180S-R73 Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors.
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
40 46.8 52 36 40 0.15 0.15 Note 1) Above figure is for D-A73/A80.
24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.
CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14
CL CL1 MLGC CNG Compact overall length 36 to 50 mm increase in length compared to compact cylinders Series CDQ2.
bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR PWR, ALM, MS, NS PWR, ALM, SF, BF PWR, ALM, MS, NS PWR, ALM, COM Cable length [m] Actuator cable: 20 or less Cooling system Natural air cooling Operating temperature