33

r q t !

Air Combination

,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D -(F,N)02~(F,N)04(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC50(A)-(F,N)06(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,

RZQ

=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

3

Body material: C37, Stainless steel w VX2 q VXK e VXD r VXZ Component Parts VXS VXS t No.

MK

w e r t No. !

Electric Actuators

Effective thread depth 4 (PE terminal) M3 x 0.5 Stroke + 126 3.3 LXFH5S Q 24 1 3 21 5 3 25.5 80.5 5.8 Label 8 59 F 5H9 +0.030 0 depth 5 T-slot dimension (2/1) 29.5 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 6 (11.5) 38 E M3 x 4l 4-M5 x 0.8 (for body mounting) thread depth 8 Crimping terminal When using a PE terminal, use accessories included as shown on the left.

LX

Effective thread depth 4 (PE terminal) M3 x 0.5 Stroke + 126 3.3 LXFH5S Q 24 1 3 21 5 3 25.5 80.5 5.8 Label 8 59 F 5H9 +0.030 0 depth 5 T-slot dimension (2/1) 29.5 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 6 (11.5) 38 E M3 x 4l 4-M5 x 0.8 (for body mounting) thread depth 8 Crimping terminal When using a PE terminal, use accessories included as shown on the left.

80

Body material: Aluminum, PPS resin, Brass, Stainless steel Body material: PPS resin (One-touch fitting type) u y t r e w q u y t r e w q OUT 2 IN 1 OUT 2 IN 1 i Component Parts Component Parts No. Description Solenoid coil Fixed armature Tube Return spring Armature assembly Seal Body No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

F G H ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 14.2 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N 14.2 Applicable tubing diameter E 17.2 17.2 20 20 ZX 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DS-10-12-12 22.45 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

IDG

e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

XM, XY

0) q Magnet (Optional) !

LX

Effective thread depth 4 (PE terminal) M3 x 0.5 Stroke + 126 3.3 LXFH5S Q 24 1 3 21 5 3 25.5 80.5 5.8 Label 8 59 F 5H9 +0.030 0 depth 5 T-slot dimension (2/1) 29.5 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 6 (11.5) 38 E M3 x 4l 4-M5 x 0.8 (for body mounting) thread depth 8 Crimping terminal When using a PE terminal, use accessories included as shown on the left.

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C