AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Digital Flow Switch (Integrated display type)

Ensure that the FG terminal is connected to ground when using a commercially available switch-mode power supply. When a switch-mode power supply is connected to the product, switching noise will be superimposed and the product specification can no longer be met.

Digital Pressure Switch

Non-compliance with the load specification Connect a suitable load. (2) Check that the impedance of the input equipment (A/D transformer) is suitable. Analogue output is not provided. (specified accuracy is not satisfied.) 6 After energizing, the display and output can drift. For detecting fine pressures, warm up the product for 10 to 15 minutes.

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

PSxx-OMM0002CN

6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa

AS

C D E F G H J K L AS100P-04-04 AS200P-04-04 AS200P-06-06 AS250P-06-06 AS300P-08-08 AS300P-10-10 23.9 31.4 31.3 33.6 37 37.5 41.7 51.4 52.3 54.6 60.5 63.5 26.7 36.4 36.3 38.6 42 42.5 38.9 46.4 47.3 49.6 55.5 58.5 26 30 30 32 36 39 9.3 9.3 11.6 12.8 15.2 18.5 17 17.1 18 18 19 22 4 4 6 6 8 10 4 4 6 6 8 10 10 13.6 13.6 17 22 22 12.7 12.7 13.5 16.8 18.5 21 17.4 18.9 19.9 24.1 27 30.5 22.4 25.7

Solid State Auto Switch

D-M9NA# D-M9NAV# D-M9PA# D-M9PAV# D-M9BA# D-M9BAV# Sheath Outside diameter (mm) 2.6 Insulator Wires 3-wire (Brown, Blue, Black) 2-wire (Brown, Blue) Outside diameter (mm) 0.88 Cross section (mm2) 0.13 Conductor Wire diameter (mm) 0.05 Minimum bending radius (mm) (Reference value) 17 -17No.D-S-OMK0010-H Dimensions D-M9BA/M9NA/M9PA D-M9BAV/M9NAV/M9PAV -18No.D-S-OMK0010-H Revision history A:

Pressure Sensor

-100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.

VFS1000

VQ4 Electrical entry Body (Pilot exhaust) G: Grommet E: Grommet terminal 20: Individual EXH T: Conduit terminal D, Y: DIN terminal VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

AC Servo Motor Driver (MECHATROLINK-III type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

Magnetic Field Resistant 2-color Indication Type Solid State Auto Switch

Internal circuit D-P3DW(A) AND connection is not possible for this product. D-P3DW(A)SC D-P3DW(A)SE -10No.D-#S-OML0002-B Maintenance How to reset the product for power loss or forcible de-energizing Regarding set up, contents of the program may be maintained by customer's application systems.

Ionizer Gun

Route the Ionizer wires separately. 6) Flush the piping before connecting.

Solid State Auto Switch

D-M7BA# Sheath Outside diameter (mm) 2.6 Wires 2-wire (Brown, Blue) Insulator Outside diameter (mm) 0.88 Cross section (mm2) 0.15 Conductor Wire diameter (mm) 0.05 Min. bending radius (mm) (Reference value) 17 -15No.D-S-OMZ0004 Dimensions D-M7BA# Pre-wired connector A B D-M7### PC D-M7###DPC -16No.D-S-OMZ0004 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3

Manifold Specifications

234 6 255 272 7 293 310 Electrical entry position: Manifold block 2-G1, 1 1/4 Type SU Formula/Stations L1 = 38n + 27 L2 = 38n + 44 Formula for manifold weight M = 0.325n + 0.39 (kg) 2 103 120 3 141 158 4 179 196 5 217 234 6 255 272 7 293 310 ( ) Electrical entry position: Valve body ( ): DC 3-9-6

Heat Resistant Solid State Auto Switch

Remove Mount Internal circuit D-M9NJ# D-M9PJ# [Note] Please contact SMC if using AND connection. -11No.D-S-OMS0002-B Maintenance How to reset the product for power loss or forcible de-energizing Regarding set up, contents of the program may be maintained by customer's application systems.

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

Pressure Sensor

Applicable fitting size (D) PSE53-R06 6 mm PSE53-R07 1/4 inch With sensor cable -14No.PS-OME0004-G Revision history A: For B: Change template. C: Complete revision. D: Modified errors in text. E: Measurement laws are added. F: Modified errors in text. [October 2017] G: Contents revised in several places.

PSxx-OME0003CN

V] F.S.=514[V] (1%F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) Ripple -8No.PS-OME0003CN-F 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A PSE200/PSE300 (ZS-28-C) M() 37104-3101-000FL Tyco Electronics() 3-1473562-4 () XN2A-1430 () -9No.PS-OME0003CN-F PSE200 PSE300 15V 1 k () -10No.PS-OME0003CN-F (A/D ) () 20 2030 -11No.PS-OME0003CN-F PSE530 PSE531

Solid State Auto Switch

-C D-T791C D-T792C -21No.D-S-OMB0023-C D-S991/D-S9P1/D-T991 D-S992/D-S9P2/D-T992 -22No.D-S-OMB0023-C D-S99V1/D-S9PV1/D-T99V1 D-S99V2/D-S9PV2/D-T99V2 -23No.D-S-OMB0023-C Pre-wired connector D-#APC/D-#BPC D-#DPC -24No.D-S-OMB0023-C Revision history A: Limited warranty and Disclaimer are added.