Plate Cylinder

M12 x 1.75 4.3 5.1 6.9 8.7 10.5 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 G1/8 G1/8 G1/4 G1/4 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 The position of the 4 flats of the piston rod is 3 in relation to the cylinder side surface. 5 Plate Cylinder: Double Acting, Single Rod Series MU Dimensions with Mounting Bracket Foot (mm) LY LH 29 37 46 57 67 LS 79 90 96 116 123

Digital Flow Switch (Integrated display type)

A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 91 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -85No.PF-OMM0005-N PF3W704/720/740/711/721 (With temperature sensor) Temperature sensor Symbol A AA Model PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W704--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123

Compact Guide Cylinder Series MGQ

25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123

IC

100.5 70 M3 x 0.5 x 9.5 48 6 (Sensor breathing port) PRESSURE OUT CONTOROLLER 45 45 RUN 4 3 2 1 CH kPa 4 3 2 1 SW D-IN RUN UP SET P-ON READ DOWN STOP 105.5 M5 x 0.8 x 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Sensor pressure port) External sensor type 123

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

o

1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | Symbol $*Or> 4 Port (Mahitold only 5 Port dI/Nlh J!'

o

1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | Symbol $*Or> 4 Port (Mahitold only 5 Port dI/Nlh J!'

MU

X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4-4 Plate Cylinder/Double Acting Single Rod Series MU Dimensions (mm) ZZ 109 122 133 159 169 LY 56 71 89 109 129 Y 6 8 10 11 14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

e

Nominal size Stroke Nominal size: 16 101.7 (74.7) (40) 60 80 Workpiece mounting center line 70 27 27 74.7 (60) LJ1 LJ1 72 40 Motor 102 42 60 LG1 LG1 43.5 71 (60) 60 LTF LTF 123 43 129 72.4 4 x counterbore depth 3.5 22 21.3 40 LC1 LC1 32 3.5 through 9.8 LC7 LC7 4 5 6 16.5 28 4 x M4 x 0.7 depth 7 LC8 LC8 T-slot section for mounting 4 5.6 (Max. 8.6) 14.4 152 + Stroke LXF LXF Encoder cable on

Floating Joint: Standard Type JA Series

eccentricity U (mm) Operating pressure temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 19 54 123

Dual Rod Cylinder Series CXSJ/CXS

M5 x 0.8 thread depth 7.5 (Opposite side: Same) (mm) 11.5 19 CXT Z ZZ SS S Model CXSW32-10 CXSW32-20 CXSW32-30 CXSW32-40 CXSW32-50 CXSW32-75 CXSW32-100 CXSW32-125 CXSW32-150 CXSW32-175 CXSW32-200 20 9 143 10 213 83 CXSJ 153 233 20 93 Standard stroke Long stroke (-XB11) 56 163 253 103 30 CXS 56 173 273 113 40 (Opposite side: Same) 2 x 2 x Rc 1/8 thread depth 6.5 (Piping port) 183 50 293 123

Air Cylinder Series MB

33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 47 50 1/4 31.5 183 9 9 40 237 3.2 46 77.5 70 7 M18 x 1.5 47.5 58 20 10.5 27 11 279 M8 x 1.25 55.5 63 31.5 197 8.5 3/8 12 48 251 3.6 56 93 80 7 M18 x 1.5 55 58 23 12 27 14 296 M8 x 1.25 61.5 80 38 245 10.5 3/8 12 55 305 4.5 72 106 100 10 M22 x 1.5 61 72 33 14 30 14 361 M10 x 1.5 69.5 100 38 265 10.5 1/2 14 65 329 4.5 89 123

3

With temperature sensor PF3W504/520/540/511-;-;T Remote sensor unit: With temperature sensor 3-Color Display Digital Flow Switch for Water PF3W 11 AA 11 AA A A (mm) A AA Model PF3W704/504-;-;T PF3W720/520-;-;T PF3W740/540-;-;T PF3W711/511-;-;T PF3W721/521-;-;T PF3W721/521-F12-;T PF3W721/521-F14-;T 81 50 89 54 3-Color Display Digital Flow Switch for PVC Piping 109 71 135 92 115 74 119 76 123

24

Made to Order Dimensions Water resistant [mm] A B DA FA FB 50 st or less Over 50 st and up to 200 st Over 200 st Bore size [mm] 20 66 90.5 123 66 (10) (8) 21 25 67.5 91.5 123.5 67.5 (10) (9) 21 32 87 105.5 141.5 71.5 (14) (10) 24 40 87 105.5 141.5 78 (14) (10) 24 50 99.5 120.5 161.5 83 20 (12) 27 63 99.5 120.5 161.5 88 20 (12) 27 80 110.5 137.5 186.5 102.5 25 (16) 30 100 130.5 155.5 194.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Standard strokes (mm) Bore size (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 25 to 1000 50 to 1200 Note) Refer to the stroke selection Table in Technical Data 2, starting with page 123

Low Profile Slide Table MXF Series

MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | $*Or> Symbol 4 Port (Mahitold only 5 Port dI/Nlh J!'

2 Phase Stepper Motor/Without Motor Brake Series LXP

X12 100/110VAC Tamagawa Seiki Co., Ltd. 111.5 80.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 123 91 X16 200VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 111.5 87.5 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 123 91.5 X22 200

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD