MGG

) 24.5 (36.5) 23 (35) 26 (38) 50 43.5 43.5 43 40.5 38.5 40 41.5 40 37 43.5 42.5 26 (38) 23 (35) 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 29 (41) 63 50.5 50.5 50 47.5 38.5 40 41.5 40 37 43.5 42.5 34 (48) 31 (45) 32.5 (46.5) 80 59 48.5 50 47 34 (48) 31 (45) 32.5 (46.5) 100 69.5 48.5 50 47 Numbers inside ( ) are for long strokes. 33 Guide Cylinder Series MGG Proper Auto Switch

VFR

) 5 1 3 3 position pressure center Plug-in (B) (A) 4 2 Conduit terminal (F) VFR5000 (EA)(P)(EB) 5 1 3 Non plug-in 3/8: 18 1/2: 23 3/4: 25 DIN terminal (D) Grommet terminal (E) Plug-in type Non plug-in type With light/surge voltage suppressor Plug-in type Conduit terminal (FZ) Plug-in Conduit terminal (F) Non plug-in type DIN terminal (DZ) VFR6000 Non plug-in Non-locking push type 3/4: 41

VQZ1000/2000/3000

Dimensions Note) A B 29 33 41 D 67 81 93 C 40 52 63 VQZ1000 VQZ2000 VQZ3000 35 43 52 A Note) For grommet Individual EXH spacer VVQZ1000-R-5-M5 (VQZ1000) VVQZ2000-R-5-01 (VQZ2000) VVQZ3000-R-5-02 (VQZ3000) M5: VQZ1000 Rc 1/8: VQZ2000 Rc 1/4: VQZ3000 Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold block.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

Cylinder with Lock Series MNB

Contents Stainless steel Tooth ring @1 Polyurethane rubber 32 40 50 63 80 100 Damper MB 32-PS MB 40-PS MB 50-PS MB 63-PS MB 80-PS MB100-PS @2 C type retaining ring for unlocking cam shaft A kit containing nos. 39, 40, 41 and 42 (2pcs.) from the table above.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

Shock Absorbers and Rate Controls

Porl llurnber Illodel (Rell t( IH 5A 5t lolt Sire vvr. (02,1 S;l Va-l2 4f2940056 (tRl0EM74 34 .50 2.25 1.63 5.0 sJ2th-12 M4E30r0056 {tR)otMl r ,41 .or 3.50 2.15 3h 20.0 5t[42x1.5 42940056 (rR)0E l.5 .34 .50 2.25 l-63 146 5.0 5tllt6dx2 M43010056 (tRl0tM2.0li{ .41 . n l 3.50 2.7 5 Yg 20.0 Sfll85x2 M{33300560 3.0fi .53 4.00 w 24.0 Sfiltl | 5x2 M437?

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 41 Type 20 SYJ700 L type plug connector Non-locking push type With light and surge voltage suppressor N.C.

3 Port Solenoid Valve Series SYJ300/500/700

M5 x 0.8 Type 41 Applicable solenoid valve SYJ314SYJ314MSYJ324SYJ324MHow to Order SS3YJ3-41-05 --M3 Type 41 Type S41 Pilot valve is on the A port side. ( ) Valve mounting direction Stations 02 2 stations Pilot valve is opposite the A port side. Applicable blanking plate assembly SYJ300-10-2A Nil R port M5 x 0.8 : : A A R port 20 20 stations Pilot valve is on the A port side.

LEC-OM02704CN

4.10.1 4-33 4.10.2 4-34 4.11 4-35 4.11.1 4-35 4.11.2 4-36 4.11.3 (LE--) 4-39 4.12 4-40 2 - 5 515-61 5.1 52 5.1.1 52 5.1.2 53 5.1.3 54 5.2 55 5.2.1 55 5.2.2 56 5.2.3 57 5.2.4 58 5.2.5 59 5.2.6 59 5.3 5-10 5.4 5-12 5.4.1 5-12 5.4.2 5-14 5.4.3 5-26 5.5 5-32 5.5.1 JOG 5-32 5.6 5-34 5.6.1 5-34 5.6.2 DOG 5-36 5.6.3 5-38 5.6.4 5-40 5.6.5 5-41

TABLE OF CONTENTS

PORTS . (2) PLACES 1.00 (25.4) .30 (7.5) Standard valve porting is NPT. .56 (14.3) .20 (5.2) .41 (10.3) .30 Nominal Power: (7.5) Mtg.

Title not found

, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?

Speed Controller with One-touch Fitting

) AS32m1F-03-12PA 12 18.5 29.7 40.9 (41.3) 26.8 17 41 (42) AS42m1F-04-10PA 10 1/2 27 (28.6) 15.9 18.8 27.4 41.8 (42.6) 36.2 50.8 49.2 40.4 38.8 15.6 66 (72) AS42m1F-04-12PA 12 18.5 30.8 45.2 (46) 35.1 17 68 (74) 10.4 21.8 33 (33.4) 28.7 42.3 40.7 34.7 (34.2) 33.1 (32.6) 3/8 21 (21.7) 16.6 Note) The values in ( ) are for NPT thread.

51

178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40 50 63 80 100 79 85 87 93 121 121 151 152 12 12.5 11 10.5 15 15 17 20 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 13 17 17 19 27 27 32 41

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

SMC

G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

CL

41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

•

41 .5 7.50 3.8, 255 Deep type (mm) ZPT16g 16 18 12.5 17.5 20 38.5 25 43.5 3.5 ,.2 ! ! Model A .9 0 H:M6. x ' H :M8 xl y 40 43 29 35.5 3 25 6t 4.5 15 1 51 '7 E Deep type (mm) 'kClir F: , G C f F I G '1 ZPT40D y ZPT100 10 12 15 20 20 41 25 46 6 .

REA/REB

Speed 600 mm/s REAR20 3 1 9 9.5 5.2 22.8 9 6 39 37.5 39 36 38 36 7.5 21 M6 x 1 x 8 REAR25 3 1 8.5 9.5 5.2 27.8 8.5 6 44 42.5 44 41 43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 Direct Mount Type REBR REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 LD MM N P PW Q WS Z QW T W X Y K L M Model REAR10 3.5 M3 x 0.5 4.5