CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

01 02 A, B P, EA, EB 3 4 5 6 7 8 Option 1 8 Side Bottom Common Rc Rc Rc M Mixed Individual 1 4 1 4 Stations Side Bottom Individual Common 2 stations 02 For bottom ported, Rc 1/8 is only available.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 1> 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

Modular Design with Uniform Body Style

V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 110 35.5 50 75.2 40 55 9 18 7 50 65 AC40-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 110 35.5 50 80.2 40 55 9 18 7 50 65 AC50-V-D 3/4, 1 1/8 1/

5

6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.

KJ

Note) D: Max. diameter 7 8.4 12.7 15.3 13.2 15.2 13 M5 x 0.8 3.2 2.7 15.4 R 1 8 10 1/8> 0.9 0.9 13.7 15.1 15.3 15.7 14.7 16.7 M3 x 0.5 M5 x 0.8 7 9.3 15.6 12.7 4 4.5 4.5 16.4 R 1 8 7 10 4.5 4.5 11 11 16.1 17.8 M5 x 0.8 13.5 17.4 11.6 6 18.5 R 1 8 10 1/8> 2-applicable tubing T (With seal) 15-2-6 7 Miniature One-touch Fittings Series KJ Union Tee: KJT Applicable tubing O.D.

0.4

Digital unit Analog unit 1 2 3 4 5 6 7 8 Valve stations I/O unit stations 1 2 Note) Serial transmission kit VV5QC11-08C6SD6Q2N2 1 set Manifold base part number VQC1100N-51 2 sets Valve part number (Stations 1 to 2) VQC1200N-51 5 sets Valve part number (Stations 3 to 7) VVQ1000-10A-1 1 set Blanking plate number (Station 8) EX600-DXPD 1 set I/O unit part number (Station 1) EX600-

REA/REB

1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

REA/REB

M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless

HRX-OM-Q026

Monthly check . 7-4 7.2.3 Inspection every 3 months . 7-5 7.2.4 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1 Discharge of the circulating fluid . 7-8 7.4.2 Discharge of the facility water (Water-cooled type) . 7-9 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRSH100/150/200/250/300-A-20. 8-1 8.1.2 HRSH100

HRX-OM-R026

6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes and remodies . 7-4 7.3.2 How to release

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

Step Motor Controller

LB B-phase pulse detector (Differential line driver) 17 LBR Z-phase pulse detector (Differential line driver) 8 LZ 18 LZR Control common 11 LG Analog monitor 1 4 MO1 1 LG Servo system controller Analog monitor 2 14 MO2 SSCNET III optical cable Note 5) CN1A (Option) Plate SD 2 m or less SW1 CN1B SW2 Note 7) 1 2 Note 1) PE LECSS Note 6) (Axis 2) CN1A SW1 CN1B SW2 Note 7) 1 2 SSCNET III optical

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

'SI-I COM '61+1 ellAlions{aQYg {-I 6'I.tiOr'll{~\l {-I C221+1 ~221+1 COM,S 1+1 SOL.A,O I_I SOL.A,O I_I ~201-1 7 .Ia'ion. { SOL. 211I COM '81+1 ~201-1 7.1allon.{ SOL. 2' I_I COM 1\11+1 7.tatlOnS{~23(-) 7118110nl {aQY 23 (-) ~111+1 C111 +1 SOL.A2 (_I SOL.A2 (_I SOLA., 1_ I ~231-1 ~1Iono{~2'1-1 r:.ilon. { SOL. 2' I I ~~lion'{~'2(-) ~tiono{~ '21-1 ~251+1 COM 22 1+1 COM 221+1 C251+1 (Note 1) MaxImum

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

To order connector cable only Conventional type Connector dimensions (Ground) 4 (Orange) Manual override Brown: 1Blue: 3 + B 9 A 1 3 Black: 4 Interface 33.9 L 35 10 Cable length (L) Part no. Pilot valve (10-SY114) Adapter plate 300mm V100-49-1-2 V100-49-1-1 500mm 1000mm 2000mm 5000mm V100-49-1-3 V100-49-1-4 V100-49-1-7 22 33.9 14 704

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 2 3 8 / 3 S 6 3 1 1 T R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 T R K 7/8 ) 3 2 . 2 2 ( 0 4 . 1 ) 5 . 5 3 (