Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Part Number Color .003 F-2815-031-NORYL Gold .004 F-2815-041-NORYL Purple .005 F-2815-050-NORYL White .007 F-2815-071-NORYL Yellow .008 F-2815-081-NORYL Lt.

Tubing, Repeatability: ±.0002" or ±3% Flow whichever is greater Size Part Number Color .003 F-2815-031-NORYL Gold .004 F-2815-041-NORYL Purple .005 F-2815-050-NORYL White .007 F-2815-071-NORYL Yellow .008 F-2815-081-NORYL Lt.

to 48° C), Flow Tolerances: ±4%, Recommended Filtration: 5 Micron, Port Connections: Straight ports for 1/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Part Number Color .004 F-2815-041

to 48° C), Flow Tolerances: ±4%, Recommended Filtration: 5 Micron, Port Connections: Straight ports for 1/16" I.D. flexible tubing Barbs for 1/16" or 1/8" I.D. flexible tubing , Straight ports for 1/16" I.D. flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Part Number Color .004 F-2815-041

51

Mounting procedure for rod end nut 20 to 63 80, 100 t (Clearance) Retaining ring Cylinder body Retaining ring Cylinder body Rod end nut (For male thread) Clevis pin Clevis pin Retaining ring Retaining ring (Apply grease.) (Apply grease.) Flange Foot Pivoting bracket Pivoting bracket t (Clearance) Caution 1.

Process Valve

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T A B C NBR seals FKM seals EPR seals Nil B Note) None With bracket Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 3 Note

AR20-B to AR60-B

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Refrigerated Air Dryer

Combination of S and T (Because S function is also included in T.) Combination of K and V (Only one or the other may be attached.) Note 2) Standard specification is the power cable with plug.

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

Pneumatic Positioner IP300/IP3100

I I L aterial I t NIL NBB (Buna) I S Copper Free Extarnal I TFPM (Viton) High Tamperature tP300 42 0 -T-T | l t l Supply & Output Preasure Gauge I t00 no gauge Operution 01 2kgllcrf r bsingte Acring 02 3 kgf/cm'z 03 10kg /cnf 04 4 kgf/cm'?

ITV

As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.

lPSMt

Operation t 0 Single Acting 03 10kgrf/crn'z 04 4kgt'lcm2 06 6kgrf/cnf 11 30psi 12 45 psi 13 150 psi 22 200 kPa 23 300 kPa 24 400kPa 26 600 kPa 41 30 psi & 2 k$l cm2 stainless steel t42 60psi& 4 k$lcm2 stainless steel 43 100 psi & 7 k$lcm2 stainless steel NIL PT Thread PF Parallel Pipe Thread t NPT American National Standard Pipe Thread Accessoriee t NIL Standard Lever Control Lengrth (0.25

lPSMt

Operation t 0 Single Acting 03 10kgrf/crn'z 04 4kgt'lcm2 06 6kgrf/cnf 11 30psi 12 45 psi 13 150 psi 22 200 kPa 23 300 kPa 24 400kPa 26 600 kPa 41 30 psi & 2 k$l cm2 stainless steel t42 60psi& 4 k$lcm2 stainless steel 43 100 psi & 7 k$lcm2 stainless steel NIL PT Thread PF Parallel Pipe Thread t NPT American National Standard Pipe Thread Accessoriee t NIL Standard Lever Control Lengrth (0.25

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

OUT reversal -T Element service indicator Accessories B 02 03 1 4 3 8 04 1 2 1 1 2 20 2B B B B Options AMD800 to AMD1000 (Self-standing style) AMD801/901 (Piping support style) 20 00 AMD 8 20 01 AMD 8 Port size Port size Body size Body size 8 20 2BFlange 30 3BFlange 20 2BFlange 30 3BFlange 8 9 9 10 40 4BFlange 40 4BFlange 60 6BFlange Style Style 00 With manual drain cock With manual drain

ITV

Y30 Y40 Spacer 234 Y30L Y40L Spacer with L-bracket Y30T Y40T Spacer with T-bracket qAF4000 wAFM4000 eITV3000 Modular Products and Accessory Combinations Applicable products and accessories Applicable model ITV20ll ITV30ll AF3000 AF4000 q Air filter w Mist separator e L-bracket r T-bracket t Spacer y Spacer with L-bracket u Spacer with T-bracket AFM3000 AFM4000 B310L B410L B310T B410T Y30

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

indicator 04 -T 2B 1/2B 4.6-1 Mist Separator Series AM Precautions Flow Characteristics Element oil saturation Note) Compressed air over max. flow line in the table below may not meet the specification of product.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

8 04 1 2 B 11 2B B 20 2B B Options Precautions Be sure to read before handling.