Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: M Plug Connector w/o Connector, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: w/o Pressure Sensor, Air Pressure Supply, P Port: w/o Fitting, M3 x 0.5, Vacuum

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: DC Low Wattage Type (0.5W, Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: DC Low Wattage Type (0.5W, Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: Suction Filter, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±1% F.S., Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: w/o Pressure Sensor, Air Pressure Supply, P Port: w/o Supply Adapter, for Manifold

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port: ø4,

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 110VAC, 50/60Hz, Electrical Entry: L Plug Connector w/o Connector, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: Suction Filter, Pressure Sensor Specs: w/o Pressure Sensor, Air Pressure Supply, P Port: ø4, Straight, Vacuum

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±1% F.S., Air Pressure Supply, P Port: w/o Supply

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

35 40 70 29 16 34 13 20 3 22 50 19 5 1/4 CDRA1BSU80 M12 x 1.75 depth 14 0 0.036 8 112 172 28 25 12.5 16 73.5 M24 x 1.5 85 33 12 22 40 45 85 39 16 34 13 25 4 22 60 19 5 3/8 CDRA1BSU100 Foot style: CDRA1LSU Single shaft flange style: CDRA1FSU Foot bracket Auto switch D-A53 Mounting holes A port B port The dimensions above show pressurization to B port

Rotary Actuator

Corresponding parts 50 P694020-22 Di, !0, !1, !4, @2 are included as a set. 63 P694030-22 80 P694040-22 100 P694050-22 Note) When ordering replacement parts, write 1 for one set of the parts per actuator. A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

35 40 70 29 16 34 13 20 3 22 50 19 5 1/4 CDRA1BSU80 M12 x 1.75 depth 14 0 0.036 8 112 172 28 25 12.5 16 73.5 M24 x 1.5 85 33 12 22 40 45 85 39 16 34 13 25 4 22 60 19 5 3/8 CDRA1BSU100 Foot style: CDRA1LSU Single shaft flange style: CDRA1FSU Foot bracket Auto switch D-A53 Mounting holes A port B port The dimensions above show pressurization to B port

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

CLQ

x 1.5 59 16 4.2 57.5 26 112.5 6 11 12.5 98 106.5 53.5 depth 15.5 depth 13.5 75, 100 115 53 10 to 50 Rc 1/8 19.6 17.5 Rc 3/8 23 100 12 2 27 30 50 M20 x 2.5 156 27 94 M10 x 1.5 73 16 4.2 67.5 26 132.5 6.5 11 13 125 63 117 125 63 depth 15.5 depth 13.5 75, 100 9-10-22 22 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Dimensions: 63, 80, 100 Foot Style Foot style: CLQL/CDLQL L

Integrated Controller

Refer to the specific product precautions (Handling) in the Web Catalog when mounting end brackets such as knuckle joint or workpieces. 16 13 12 16 5 14 24.5 14 M8 x 1.25 25 22 20.5 20 8 17 38 23.5 M14 x 1.5 32 22 20.5 25 8 22 42 23.5 M14 x 1.5 The L1 measurement is when the unit is in the original position. At this position, 2 mm at the end.

HRX-OM-X084

Low temperature limit of temperature range monitoring function 22. Press the [] key. Displays Low temperature limit of temperature range monitoring function setting screen.

KK/KK13

-04M -04M 22 Reference dimension after installation.

Wedge Cam Operation Gripper Series MHK2

Note 2) Refer to P.22 and 23 for auto switch specifications.