SMC Pneumatic Clean Series

(Refer to Front matter 23 "Particle generation measuring method"and Front matter 24 "Comparison of cleanliness standards" for details.)

Air-hydro Unit

Table 1 CE-compliant Applicable model CCT160-400 to 800 CE marking applicable standard Directive 97/23/EC Category I Specifications CCT40 Effective oil level stroke Operating pressure 0 to 0.7 MPa Because the CCT40 is a converter for an actuator with a small capacity, it cannot be made into an air-hydro unit.

CRQ2

The figure shows the view from the long shaft end. 11-8-23 24 Series CRQ2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC22: Without Inner Rubber Bumper, -XC30: Fluoro Grease -X6: Shaft, Parallel Key Made of Stainless Steel Spec.

MGC

Mounting B F Basic Front flage Rear plate R Without rear plate With rear plate Cylinder stroke(mm) *Refer to following Stroke Table. Bore size 20 25 32 40 50 20mm 25mm 32mm 40mm 50mm Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 2-1/4 3 1 Manual override (Non-locking) 9 23 VFN212N--02-D 213 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 2-5.5 Mounting hole Pilot EXH. 177 2-1/4 3 1 9 23 Manual override (Non-locking) 4-17-2 3 NAMUR Interface 3 Port Solenoid Valve Series VFN200N NAMUR Mounting Pattern

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

How to Order VR 12 1 06 0 F Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 2 1/8 standard 1/4 standard 23 04 06 08 10 01 03 07 09 11 3.2 4 6 8 10 1/8" 5/32" 1/4" 5/16" 3/8" With One-touch fitting Use 1/8" tubing for 3.2. 1 Series VR120F Application Circuit Examples Self holding circuit 1. When "A" is turned ON, output goes ON. 2.

OMR0031

CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6. CN4: Counter Plug . 24 2 - 6.1 Counter plug specifications . 24 6.2 Counter plug wiring . 24 7.

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Compression nut design resists side loading Nut Seal lock F Seal lock E B Tubing support C D A Tubing Taper surface Tube support resists crimping and deformation of tubing.

Power Clamp Cylinder

105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

ZQ

above dimensions are for ZQ11U-J2 L-F.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

32.6 39.7 43.7 8 15.2 3/8" 17.9 59 16.2 69 23 21 46.5 41.5 23 R 3/8 19 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 53.5 46.1 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 16.2 12.9 20.6 23 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 46.5 41.5 40.2 35.2 34.4 55.3 49.1 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 23 59 18.5 19 AS431FG-04-10 AS331FG-N03-11 32.6 58 53.5 21 32.6 49.4 43.7 10 18.5 3/8" 17.9 16.2

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension

IDX-OM-W017

IDX-OM-W017-E / Series IDFA3E-23-A,C IDFA4E-23-A,C,L,R,T,V IDFA6E-23-A,C,K,L,R,T,V IDFA8E-23-A,C,K,L,R,T,V IDFA11E-23-A,C,K,L,R,T,V IDFA15E1-23-A,C,K,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2 ) *1) ISO 4414: Pneumatic fluid power General rules and safety requirements for systems and

Model Selection 1

Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O. Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O.

CP95

G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size (mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12