Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N7H (ø1/4" One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030

V100

VFN 112 (X port) (Rc1/8) (55) (For mounting) 2-8.5 40 162.2 52 (32) 86 1(P) 1(P) 1(P) 1(P) MAX.10 D: 173.4 24 Y: 172.9 162.2 MAX.10 173.4 163 52 (P port) Rc1/2 (Pitch) 300 Pg9 Pg9 Y: 131.7 148.7 119.7 129.7 (Lead wire length) (Non-locking) Manual override 41 37 8 L2 129.2 139.2 124.2 134.2 D: 129.7 146.7 L1 Applicable lead wire O.D. 2.3 to 2.8 134.2 144.2 Y: 140.7 157.7 Applicable cable O.D

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

Table of Contents

(No protrusion from the rod end) P . 43 Low speed: Series CUX 2 Series CU Precautions on Free Mount 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Vacuum Pad

ZP3P-20PTSF ZP3P-25PTSF ZP3P-35PTSF ZP3P-50PTSF p. 2 q Pad unit With Buffer p.6 e Buffer assembly Pad diameter Part no. 20 25 35 50 Dimensions ZPB2(J/K)10-B5 V V ZPB2(J/K)20-B5 V V ZPB3(J/K)10-B01 V V ZPB3(J/K)20-B01 V V p. 12 e Buffer assembly w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V w T female thread adapter p. 11

Compact

Pilot port * Details of the mounting bolts P. 6 Stroke/Minimum stroke for auto switch mountings P. 15 Bore size Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 16 20 25 Applicable Auto Switches/Refer to the Web Catalog or Best Pneumatics for further information on auto switches.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

KJ

P. 4 KJH P. 6 KJT P. 8 KJU Different diameter straight Union tee Different diameter plug-in Y Use to branch line with size down in the same direction from One-touch fittings. Use to connect different sized tubes. Use to connect tubes in both 90 directions. P. 5 KJH P. 8 KJX P. 7 KJT Male elbow Different diameter tee Branch Y Use to pipe at right angles to female thread.

SY

ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated port Regulated port Pressure gauge connecting port Pressure gauge connecting port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P A1 B1 Pressure gauge (G15-10-01) Plug

IDX-OM-W093

J M N O L K H mm A B C D E F G H J K L M N O P IDF60 R1 307 745 605 161 405 681 71 330 704 355 126 46 12. 94 5 IDF70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDF80 R2 438 957 863 169 480 958 219 78 100 11. 0 463 916 485 170 IDF90 13 IDF80 IDF90 mm IDF60 745 957 () () 704 916 () 355 () 330 485 463 IDF70 890 849 () 390 365 IDF60/70/80/90 Series 7-3 IDX-OM-W093 7.4 IDF60/70-20

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

Electromagnetic Digital Flow Switch

LFE Remote type sensor unit 1 3 J Remote type monitor unit For details, refer to p. 10. Remote type sensor unit 3 A LFE 1 Integrated display type Rated flow range Made to Order (Refer to p. 17.)