Air Cylinder RSQ Series Stopper Cylinder

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Refer to "Connecting to other series" on page 22. Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 Options Sensor cable (3m) + Connector (1 pc.)

Pneumatic Positioner IP300/IP3100

06 6kgticnf 11 30psi 12 45 psa 13 150 psi 22 23 24 26 41 I t al (Silicon) Low Temperatufe L Porl Connection NIL PT Thr6ad PF Parallel Pip Thread t l{PT Amarican National Standard Pioe Thread Acceesoris t l{ll Standard Lever Control Lengrth (0.25 to 3.35 inches) (6lo 85mm) D High Pressure Signal Spring K 1/2 Split Range Spring E Longsr Lever Control Length (2.35 to 4.33 inchss) (60 lo 11omm

Electro-Pneumatic Positioner Series IP8000/8100

Size M Size N Unit number Pilot unit part number Part number Orifice size Stroke 10 to 85mm (Accessory Nil) Actuator Capacity 90cm3 P368010-20 125 150 P565010-18 P36801080 0.7 35 to 100mm (Accessory E) 180cm3 P368010-21 110 195 P565010-19 P36801081 1 50 to 140mm (Accessory F) P368010-22 110 275 Fork lever joints (IP8100 type) Two types of the fork lever joints are available dependent upon

Vacuum Regulator Series IRV

Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60 50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22

LX Series Compact Electric Actuators

Allowance &Table Deflection ,.page 10 Criteria of Accelerating Speed . .page 11 How To Order. .pages 12 & 13 How to Mount .Page 14 Dimensions. ."...pa9es 15 & 16 Specifications/Construction/Parts List . ...page 17 Selection Chart & Duty Ratio ..,.page 18 Criteria ol Accelerating Speed . .page 19 Table Deflection ..,. .page 20 Working Range & Operating Conditions .pa9e 21 How To Order. .pages 22

Electric Actuators

Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22

Air Operated Chemical Valve Compact type Series LVD

chemicals such as acids, bases and ultrapure water. j With flow rate adjustme Options Variations Applicable tubing outside diameter Flow rate Orifice diameter Series characteristics Inch size 3 4 6 8 10 12 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 2.1 2 LVD10 (0.09) LVD20 LVC20 8.4 4 (0.35) 31.2(1.3) 40.8(1.7) 45.6(1.9) LVD30 LVC30 LVD40 LVC40 LVD50 LVC50 8 10 60(2.5) 120(5) 144(6) 16 192 LVC60 22

Electric Actuator with Integrated Guide Series LTF

to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K to 1000 to 890 to 710 to 580 to 480 64 32 LTF8FNL-K to 890 to 710 to 580 to 480 to 1000 71 50 18 LTF6EPF-K to 300 to 230 54 22

5 Port Solenoid Valve Series SQ1000/2000

max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5 232 262.5 273 10 227 249.5 275 285.5 11 244.5 267 287.5 298 12 262 284.5 312.5 323 13 279.5 302 325 335.5 14 297 319.5 350 360.5 15 314.5 337 362.5 373 16 332 354.5 375 385.5 L1 L2 L3 L4 22

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

SX3000 Response time ms Type of actuation With light/surge voltage suppressor 15 or less 2 position single 13 or less 2 position double 20 or less 3 position SX5000 Response time ms Type of actuation With light/surge voltage suppressor 26 or less 22 or less 38 or less 2 position single 2 position double 3 position Weights Type of actuation Weight g 67 75 Valve model Single Double Closed center

Double Layer Tubing Stripper, Series TKS

Variations Dimensions mm Weight g Tip color Applicable tubing Model D1 D2 L TKS-06 16 Orange TRB0604, TRBU0604 58 45 D2 D1 TKS-08 18 Yellow TRB0806, TRBU0805 35 TKS-10 Blue 20 TRB1075, TRBU1065 62 50 TKS-12 Green 22 TRB1209, TRBU1208 Inner tubing material/TRB: Nylon, TRBU: Polyurethane L 9.7 (3/8")

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

center VQ2000 VQ200 2 to 16 stations Options: Built-in silencer Direct exhaust VV5Q21Side 5.4 (0.3) Rubber seal VQ1301 25 or less 33 or less VQ201 78 3.6 (0.2) VQ1400 Metal seal 20 or less 26 or less Exhaust center 5.4 (0.3) VQ1401 Rubber seal 25 or less 33 or less 3.6 (0.2) VQ1500 Metal seal 20 or less 26 or less Pressure center 5.4 (0.3) VQ1501 Rubber seal 25 or less 33 or less Metal seal 22

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Compact Vacuum Ejector Series ZQ

consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 3 Series ZQ Specifications Ejector Weight Model 95 g Suction filter Note 1) ZQ107 ZQ105 ZQ110 Single unit Nozzle nominal diameter mm 109 g Switch and suction filter Note 2) 0.7 0.5 1.0 Maximum suction flow l/min(ANR) 122 g End plate assembly for manifold 10 5 22

Ejector Valve Unit, Series ZYY/ZYX

ZYY35LZ-10S1 2 SETS 1 SET 3 Ejector Valve Unit Series ZYY/ZYX Ejector Valve Specifications Series SY3000/SX3000 DIN rail mount type can be mounted in manifold /split base combinations ZY3 07S ZY3 07L ZY3 10S ZY3 10L Ejector valve model Nozzle diameter mm 1.0 0.7 Compact (integrated construction of ejector and valve) Copper free measures implemented Max. suction flow rate Nl/min 11 18 22

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).