KA

KAU23-M5 38 9.6 15.5 34.5 9 M5 X 0.8 M6 X 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 9.6 1 8 KAU23-M6 KAU23-U01 11 39.5 KAU04-M5 4 M5 X 0.8 M6 X 1.0 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 42.5 KAU06-M5 M5 X 0.8 M6 X 1.0 39 2.2 2.2 12 KAU06-M6 43 13 17 12.8 1 8 3 8 KAU06-U03 46 45 43.5 39.5 17 14 12.8 KAU06-U01 13 6 1 4 39 KAU06-U02

MQQ

16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 4-13-8 9 3

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-11 pc. (Blanking plate) VV3Z4-50-061-01 (6 stations) VZ415-1G3 pcs. VZ425-1G2 pcs. VVZ400-32A-21 pc.

VSA4

2 position single: VSA4140 2 position double: VSA4240 3 position closed center: VSA4340 3 position exhaust center: VSA4440 4-9 (11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body

Free-Mounting Cylinder with Air Cushion Series CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Rotary Gripper Series MRHQ

closed Finger closing port 5 0 0.1 4-M2.5 x 0.45 (mounting screw attachment ) 3 Max. 6.1 4-M4 x 0.7 5.7 12 2.5 Depth 6 (two on opposite side) 34 63 22.5 M5 x 0.8 Finger opening port 5 2 11.5 3-R1.5 23 18 11 25 15.5 41.5 4.5 33 Angle adjustment bolt 2-8 Depth of counter bore 2.5 3-R1.5 11 2-4.5 through 2 3-3H9 + 0.025 0 Depth 4 (one each on three sides) 10 3-3H9 long groove depth 3 + 0.025

Air Pilot Operated Series NVSA

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399

AC Servo Motor Driver (CC-Link Type)

Requires set up software(MR Configurator2TM) . -11- 3. Wiring 3.1 Power Supply Wiring Connect the actuator and driver power supply. (1) LECSC (Absolute encoder) EX.)

IDX-OM-W093

R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90

Air preparation filter

Application 11 3. Specifications 11 4. How to Order 12 5. Component name and spare parts list 13 6. Troubleshooting 14 7. Assembly and replacement procedure 7-1. Bracket assembly 15 7-2. Auto drain replacement 15 7-3. Element replacement 19 8. Dimensions 20 -2- Doc. no.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Adjuster for series 11-MXP6 is available for one side only. Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 4.5 0.46 0.61 2.3 3 8 (10A) 6 0.3 1.1 4.1 8 0.3 1.6 6.4 1.0 10 0.3 2.2 11 1 2 (15A) 10 0.3 2.2 11 Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

•

-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

3 Port Air Operated Valve

441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry