m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.83

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R

Mounting: G (Rear Flange), Bore Size: 25 mm, Cylinder Port: M Thread: 20, 25 Bore; Rc: 32 to 63 Bore, Stroke: 10 mm, Rotation: R (Right Rotation), Body Option: Standard (Female Thread), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3 m)