Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150 200 250 300 350 400 50

VER2000/4000

6 q w e r t y u i Block packing !

ZX

Code w Ejector exhaust type Weight Standard accessory Codes q and w are corresponding to the suffixes in How to Order to indicate the exhaust method.

Heavy Duty Stopper Cylinder

head cap screw (M2.5 x 12 L). e If the detecting position is changed, go back to step q.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

SI Unit for Vacuum Manifold

Designation Content 1 L+ +24 V for logic/input 2 P24 +24 V for output 3 L0 V for logic/input 4 C/Q IO-Link communication data 5 N24 0 V for output Fig 2-1. Pin allocation of M12 5 pins plug A-coded connector The power supply for logic/input and the power supply for output are isolated. 2.2.

CV/MVGQ

Description Note Note Material Aluminum alloy Material Zinc alloy Clear anodized Plate q !2 MK(2) Refer to the note below. Clear anodized Aluminum alloy Head cover Solenoid valve w !3 Stainless steel Cylinder tube Aluminum alloy Clear anodized Pipe e !4 RS Q G Stainless steel Piston rod NBR Piston seal r !5 Brass Piston NBR Rod seal t !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS Series Workpiece mounting pitch: Same dimensions Table width Height q LEFS Series Height w Body mounting pitch: Same dimensions Body width The body bottom positioning pin holes have been standardized.

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

CV/MVGQ

For details, refer to page 10-20-61. 10-15-12 Valve Mounted Cylinder Single Acting, Spring Return/Extend Series CVJ3 Construction/Component Parts Single acting, Spring return RE A B REC CX CY MQQ M RHC MK(2) RS Q G Single acting, Spring extend RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC Component Parts RB No. Description No.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Manifold Specifications

Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-41 Series VZ3000 Exploded View/DIN Rail Manifold Type 45 Manifold r w U side r q e w (b) Lever (a) Bolt (Both sides) e (a) Bolt (Both sides) Replacement Parts No. Part no.

Clean Regulator/Fluororesin Type

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

RSH

0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

Nozzle for One-touch fittings; Tube materials: KN-Q*A, KNA: PBT; KN-Q, KNAG: SUS; Multiple nozzle diameters: KN-Q(*A) only; Compatible fitting series: KN-Q*A, KNA: KQ2, KC, KB, KP, KX, KS, KQB2, KQG2; KN-Q, KNAG: KQB2, KQG2; Meets OSHA 1910.242(B) standard for deadhead pressure [KNA(G)] only

Nozzle for One-touch fittings; Tube materials: KN-Q*A, KNA: PBT; KN-Q, KNAG: SUS; Multiple nozzle diameters: KN-Q(*A) only; Compatible fitting series: KN-Q*A, KNA: KQ2, KC, KB, KP, KX, KS, KQB2, KQG2; KN-Q, KNAG: KQB2, KQG2; Meets OSHA 1910.242(B) standard for deadhead pressure [KNA(G)] only

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C