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connected to the Select the COM port to which the communication COM port which has been communication cable is connected using the configuration software. cable is connected selected in the configuration is wrong. software. 95 - Revision history A: Revised in November 2015 B: Revised in November 2019 C: Revised in June 2020 D: Revised in January 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

ZKJ-OM00201-D Revision history A: Added contents[April 2022] B: Added UKCA marked[July 2022] C: Added specifications[September 2022] D: Added specifications[February 2023] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part

. -40No.EX-OMZ0018 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved. No.EX-OMZ0018

500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 1 0 3 1/2 7 LED 2% F.S.1 digit(253 ) ON OUT1 OUT2 IP40 550 AC1000 V 1 50M (DC500 V ) 2F.S.550 25 5 3.52 m 0.15 mm2(AWG26) 1.0 mm CE RoHS 1 -52NO.ZK2-OM00801-B Revision history A: OUT2 B: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

3.5, 2 m Lead wire Sectional area of conductor: 0.15 mm2 (AWG26) Outside diameter of insulator: 1.0 mm Standard CE/UKCA marking, RoHS A 1: If the applied pressure fluctuates around the set value, the hysteresis must be set to a value more than the amount of fluctuation or chattering will occur -54NO.ZL3-OM00701-A Revision history A UKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

B: UKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.TQ0010298-OM003-B

ZQ-OM01501 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S.1 digit(253 ) ON OUT1 OUT2 IP40 550 AC1000 V 1 50 M(DC500 V ) 2FS 55025 5 3.52 m 2(AWG26) 0.15 mm 1.0 mm CE RoHS 1 51 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Locked state The arrowhead of the collar Body Procedure 3 Procedure 2 Procedure 5 Element Procedure 5 transparent cover -10- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC

TQ1230001-OM107 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved No. TQ1230001-OM107

Make sure that the pad is correctly in place (The pad is not lifted from the surface) Remove the old pad Fit the new pad into the groove 24 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

When it is necessary to disassemble, please contact the SMC Sales representative. 26 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 27 -

When it is necessary to disassemble, please contact the SMC Sales representative. 28 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 29 -

D: Added example of wiring to robot controller 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 43 -

Description Contents of check Date IDF60/70/80/90 Series 14.1 Inspection record 14-1 Revision Rev HMar,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

OFF ON OFF ON 6 4 3 2 2 1 8 4 0.5 10 5 0.5 min s IDF60/70/80/90 Series 13-2 IDX-OM-W093 14 14.1 / IDF60/70/80/90 Series 14-1 Revision history 2020 6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

3.1 m 3/min 50Hz 2.9 2) 60Hz 3.2 MPa 0.7 35 32 10 () AC100V(50Hz) AC100,110V(60Hz) 3) AC200V(50Hz) AC200,220V(60Hz) 3) (50/60Hz) W 420/480 (50/60Hz) A 4.3/4.6 3.4/3.1 4 ) A 10 R134a(HFC) () Rc1 kg 46 1 2 () kW 15 1(ANR)[2065%] 2[32] 3() 430mA 6 1 6. 6.2 IDF15E1 mm 603 41 54 300 16 C R 1 C R 1 87 578 [AC200V] [AC200V] 396 0.8m (10, (:10, :0.8m) 43 15 270 13 4x 380 101