1

G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11

MGQ

For details, refer to page 8-30-32. 8-20-11

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

(The selection should allow a sufficient margin because the value calculated by the selection software involves an error with reference to the actual value.) m3max m1max m2max Weight kg MY340 20 30 40 50 Collision deceleration G 1500 N 10 5 4 3 2 1 40 30 20 10 5 4 3 2 1 m3 max m1 max m2 max Weight kg 8-14-11 11 Series MY3A/3B Model Selection 2 Calculation of Guide Load Factor 1.

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

Peltier-type Chiller Thermo-con/ Compact Type

Power Supply Cable. p. 11 Dustproof Filter. p. 11 Specific Product Precautions. . p. 12 4 HEF Series Cooling Capacity Calculation Air-cooled Example When cooling the object below a certain temperature in certain period of time.

MHx-OMY0005

No.MH*-OMY0005 // MHF2-8D MHF2-12D MHF2-16D MHF2-20D 1. . 4 2 . 5 2-1 . 5 2-2. . 5 2-3 . 6 2-4. . 10 2-5 . 11 2-6. . 11 2-7. . 11 3 . 11 3-1. . 11 3-2. 1 . 12 3-2. 2 . 13 3-3. 1. 14 3-3. 2 . 15 3-4. /1 . 16 3-4. /2 . 17 1 *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems

IDX-OM-W094

R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-

10

[mm] Adjustment bolt (Mountable on either right or left) A Model A B C D E F MM MHL2-10DZ-X28 22 15.5 2.5 7 4 2 Max. when adjusted: E M5 x 0.8 MHL2-10D1Z-X28 11 16 MHL2-10D2Z-X28 11 16 MHL2-16DZ-X28 27.5 18.5 3 8 B 9.5 9 M6 x 1 MHL2-16D1Z-X28 13.5 20 MHL2-16D2Z-X28 13.5 20 MHL2-20DZ-X28 32.5 21 4 12 MM 7.5 7 M8 x 1 MHL2-20D1Z-X28 8.5 9 MHL2-20D2Z-X28 8.5 9 MHL2-25DZ-X28 38 26 5 Closing stroke

CRQ2

) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

29 D9h9 0 0.036 2-4.2 209.6 4.7 32 1 4.7 3 2-3 10 (35) 8 15.5 13.4 2 2 8 0.05 0 3 0 0.02 3 0 0.02 Open: 16 Closed: 10 Dimensional Differences between MHR and MDHR Regardless of auto switch installation, some body dimensions are different. 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) A 12 12 B A 5 4.7 B 14.5 14.5 15.5 15.5 Model -10R -10E -10R -10E MHR2 MDHR2 4 4 4 4 12-5-11

ITV0000

(For details, refer to "Specific Product Precautions 1" on Page 11.)

MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1". 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1,LQ2 2 Body class LQ2 Symbol 2 3 4 5 6 LQ2 Applicable fitting Body class

V

ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 14" 9.5 (N)ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5 8 18.5 38" 11 (N)ZFB401-13 64.5 34 87.5 30.5 16.5 34 24 21.5 81 25.6 23 21.7 12" 13.5 H O W T O O R D E

3 Port Solenoid Valve

AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

•

I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

Cylinder

I ' . 0.040 6 7 11 17 8 M3 x O.5 I. 16.5 10.5 6 B M10 X1.0 9 3 7 3 , 065 '10 . , jj:!'