80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

External gripping force Internal gripping force MHS2-32D MHS2-32D 150 150 Pressure 0.6MPa Pressure 0.6MPa 120 120 0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 90 90 0.3MPa 0.3MPa 60 60 0.2MPa 0.2MPa F 30 30 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L mm Gripping point L mm MHS2-40D MHS2-40D 250 250 Pressure 0.6MPa Pressure 0.6MPa 200 200 External gripping

Regulator for 2 MPa ARX 20

300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics Conditions: Upstream pressure 2.0MPa Downstream pressure 0.8MPa Flow rate 60l/min (ANR) Conditions: Upstream pressure 2.0MPa Downstream pressure 0.3MPa Flow rate 60l/min (ANR) ARX20 ARX21 0.89 0.88 0.37 0.36 Downstream pressure MPa Downstream pressure MPa 0.87

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Ambient and fluid temperature Piston speed Cushion Thread tolerance JIS class 2 +0.8 0 +1.0 0 +1.25 0 +1.4 0 +1.8 0 to 100mm mm, 100 to 250mm mm, 250 to 630mm mm 630 to 1000mm mm, 1000 to 1200mm mm Stroke length tolerance Basic type (B), Axial foot type (L), Front flange type (F), Rear flange type (G), Single clevis type (C), Double clevis type (D), Center trunnion type (T), Front trunnion

Modular Type Filter Regulator Series AW

55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting B With drain guide B Metal bowl B 107 160 214 251 255 Metal bowl with level gauge Model B AW10 AW20 AW30 AW40 AW40-06 234 272 275 209 247 250

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250

Series MXP Precision Air Slide Table

Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165 Series MXP Precision Air Slide Table Construction MXP10,12,16 9 8 1 2 3 11 19 7 10 14 13 15 18 17 16 12 5 4 6 Description Material Note Parts list Description Material Note Parts list No.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

and based on the proportional relationship to these lines, the pilot air pressure for this point is approximately 0.25MPa. 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air consumption 400 350 Air consumption l/min (ANR) SUP=0.5MPa Note 1) Even when switching cycles are changed for PA3000 with SUP=0.2MPa or PA5000 with SUP=0.2MPa or 0.3MPa, there is almost no change in the lifting height. 300 250

Process Pump Series PA3000/5000/PAX1000 Series PB1000

and based on the proportional relationship to these lines, the pilot air pressure for this point is approximately 0.25MPa. 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air consumption 400 350 Air consumption l/min (ANR) SUP=0.5MPa Note 1) Even when switching cycles are changed for PA3000 with SUP=0.2MPa or PA5000 with SUP=0.2MPa or 0.3MPa, there is almost no change in the lifting height. 300 250

3 Position Cylinder Series RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Solid State Vacuum Regulator Series ITV2090/2091

or less Current type Input impedance Approx. 6.5k Voltage type VAC OUT Tank Approx. 2.7k Preset input ITV2090 1 to 5VDC (load impedance: 1 k or more) Set pressure (Vacuum) Vacuum pump, Ejector Analog output 4 to 20mA (sink type) (load impedance: 250 or less) Output signal Note 3) (Monitor output) NPN open collector output: Max. 30V, 30mA Switch output PNP open collector output: Max. 30mA

Swivels

1 1-1/4 1-1/2 2 Maximum Rated Pressure (PSI) 5000 5000 5000 5000 4000 4000 4000 3000 Except the following port options in the noted size 03 (Male JIC 37) 3000 2000 05 (Male SAE O-Ring Boss) 2500 06 (Female JIC 37) 90 Housing Port 4000 3000 3000 2500 2000 06 (Female JIC 37) In-Line Housing Port 3000 2000 07 (Female NPSM) 4600 3000 2600 2100 1650 1500 Temperature Range (std seals) -40 to 250

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12 248 237.5 212.5 18 13 248 237.5 223 12.5 14 260.5 250 233.5 13.5 15 273 262.5

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Multistage Ejector Series ZL

Multistage Ejector Series ZL112/212 Energy saving, large flow rate, 3 stage diffuser construction Series ZL112/212 Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, one stage model) 1 stage performance Maximum suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure Q1 Q2 Q3 ZL112 100 200 ZL212 63 126 Q1 Q2 Q3

OMR0031

Speed Vc Acceleration Aa Speed [mm/s] Total travel distance S Time [s] Positioning time Tp LAT3LAT3MLAT3FShortest positioning time [ms] 600 350 700 Shortest positioning time [ms] Shortest positioning time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g

VBA-OM-P019

150 500 Rc3/4 355 250 Rc1/2 85 VBA42A IN IN OUT OUT VBA2,4 24NmM10 1 VBA4 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com VBA2 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer 2010 SMC Corporation All Rights Reserve

VBA-OM-S007

VBA4 4 VBA2 1 O VBA4 1 1 1 VBA4 4 VBA2 4 1 1 1 1.0MPa ( 3 ) VBAT-V1 () () VBAT20S1-T-X104VBAT38S1-T-X104 / / VBAT-M47C / VBAT-M47 / 2 /VBAT20S-Y-4 VBAT-T OUT VBAT-M47C VBAT20S1-T-X104 VBAT38S1-T-X104 VBAT20S1-T-X104 VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75 oC 1/4 IN 1/2 1 SMC VBAT-V1 1 305 236 355 250