Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

VXR21/22/23

Add 10 g for conduit type, 30 g for DIN terminal 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential min. operating pressure differential and max. system pressure.

V

~ 75PSI 30 ~ 75 PSI Standard Supply Pressure 0.4MPa / 160PSI Hysteresis Hysteresis modo, wind comparator modo 160PSI Operating Temperature Range 5 ~ 50C / 40~120PSI 40~120 PSI Temperature Specification + -3%F.S.

NCRBIBwserbs

180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.

Adsorption Plate

SP 30 1 1 Adsorption Plate Port position Refer to the table for the port position dimensions on the side. The back side port is plugged with a Tapered Screw Plug.

SYA3000/5000/7000

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 (Breathing hole) 1/4 (P port) 1.2 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8

5 Port Air Operated Valve SYA3000/5000/7000 Series

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 1/4 (P port) 1.2 (Breathing hole) 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 1/8 (EA, EB port) 2 x 2.2 die-cast hole (For manifold gasket positioning) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1470 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position double SYA7220-(F2) C8

Shot Pin Cylinder

16 0.1 16 0.1 16 0.1 30 0.03 4 surfaces 2 x 11 4 surfaces 2 x 8 F7 Coil scraper 60 0.05 45 10 15 78 67 48 11 152 + Stroke 115 A A 60 0.03 9 30 30 Protective plate M12 connector (4 pin) 2 x 10 F7 depth 20 60 108 4 x M10 depth 20 (Helisert) 90 0 45 G, NPT1/4 19 15 15 Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

MDHR2-30 33 34 16 28 12 20 M5 x 0.8 1122112230 58 59 19 37 18 Note 1) Refer to the Best Pneumatics No. 4 for details of gripping force at each gripping point.

Information

Bore size Stroke range head cap screw for Model Bracket CW CT CL CX CD M CZ R mounting pivot bracket (Accessory) Without auto switch With auto switch 15.5 20 25.5 28 15.5 20 25.5 28 4.5 4.5 6.6 6.6 4.5 4.5 6.6 6.6 M4 x 10 L M4 x 10 L M6 x 12 L M4 x 10 L M4 x 10 L M4 x 10 L M6 x 12 L M 6 x 12 L 5 6.5 8 10 5 6.5 8 10 5 to 30 5 to 30 5 to 50 5 to 50 5 to 30 5 to 30 5 to 50 5 to 50 14 15 18 20

Compact and Lightweight

ZH2-TB201-A 1 M4 x 30 2 pcs. ZH2-TB202-A 2 M4 x 50 2 pcs. Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs.

Clean Regulator/Fluororesin Type

3/8" SRF30S-1S11 SRF30S-1S1113 SRF30S-1S13 SRF30S-1S1311 SRF30S-2S11 SRF30S-2S1113 SRF30S-2S13 SRF30S-2S1311 35 58 ITVH 35 58 34 62 IN 67.7 32.3 OUT 34 62 ITVX 34 62 35 58 34 63 PVQ 34 63 32 65 A1 A2 32 65 5.5 VY1 32 65 34 63 B1 B2 VBA VBAT Tube extensions 41.7 AP100 Pilot port Rc, NPT 1/8 R 12 75 52 67.7 32.3 64 1 2 SMC 4 x 5.5 (Mounting hole) 41.7 1/4" OUT IN 5.5 3/8" 52 30 30 885

NCQ8

Auto Switch Internal Circuit D-A90, A90V Contact protection box CD-P11 CD-P12 OUT () Brown Reed switch Unit: OZ, ( ): g Weight to OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.28 ( 8) 0.28 ( 8) Lead wire length 30 in (0.5 m) D-A93, A93V Lead wire length 118 in (3 m) 1.06 (30) 1.06 (30) 1.06 (30) 1.06 (30) 1.45 (41) 1.45 (41) Brown (+) Contact

Precision Regulator

Modular adapter IR-X170 ARJ AR425 to 935 ARX AMR ARM Applicable modular size IR1000 series: 20 type IR2000 series: 30 type IR3000 series: 40 type ARP IR-A 1 The Made-to-Order product (IR-X170) is the product number with a modular adapter attached to the standard product.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

I/O Configurator (NFC version)

Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4. Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4. Setting Function 56 4.1. Edit TAG 56 4.2. Software Control 56 4.3. Forced output 58 4.3.1. Forced output conditions 58 4.3.2. Forced output procedure 59 4.3.3.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60