Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

New

22 2.3 33 (8.5) 50 4 x 5.5 8 x 4.5 22 50 4 x 7 <36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Two switch spacers are included with the product with built-in magnet. 906 Rotary Actuator 11-CRA1-Z Dimensions: Basic Type, 11-CRA1S30 Size: 30 Single shaft Double shaft 75 10 8 6 0 0.2 8 (g6) 7.8 0 0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

A_HEC-OM-K001

This can break M5 female thread 4.3 Wiring 4.3.1 Circuit Breaker (Ground Fault Circuit Interrupters) Chemical Thermo-con must be installed downstream of a Circuit Breaker.

Short Stroke Electric Actuator Series LX

(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.

SYJA300

) 2 x 3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P, A, R port) M5 x 0.8 23 1794 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With bracket F Nil Without bracket SYJA 2 5 1 M5 Body

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

Fieldbus System

1 A, B port size q Series y Pilot valve option Thread piping 3 5 Standard (101 psi (0.7 MPa)) Quick response type (101 psi (0.7 MPa)) High pressure type (145psi (1.0 MPa)) Nil B K Applicable series SY3000 SY5000 Symbol M5 01 Port size M5 x 0.8 1/8 SY3000 SY5000 w Type of actuation Only metal seal type is available for the high pressure type.

Slider Type Ball Screw Drive/11-LEFS Series

Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28 3.5 39.4 ( ) +0.025 0 3H9 depth 3 L Cable length 250 (37) A (Table traveling distance) Note 2) (110) 37 40 (41) [39] 39 [(41)] Stroke (2.4) 7 65 [Origin] Note 4) Origin Note 3) 27 4 [2] 2 [4] 9.2 Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.8 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Motor option

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

XM, XY

Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C XMA XYA Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right flange surface Indicator

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

If it is lubricated, it could lead to sticking or slipping. 0.59 M3 x 0.5 2 1.4 M4 x 0.7 2.8 M5 x 0.8 3 0.59 M3 x 0.5 545

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

Bore size Auto switch Port thread type 20 25 32 40 50 20 mm Without auto switch (Built-in magnet) Nil 25 mm M5 x 0.8 Nil 32 mm For the applicable auto switch model, refer to the table below. Rc 40 mm TN TF NPT 50 mm G Rear plate Bore sizes 20 and 25: M5 x 0.8 only Nil R Without rear plate With rear plate Cylinder stroke (mm) Refer to Standard Stroke on page 393.

IDX-OM-M051

The connection size is M5. Applicable crimped terminal width: 9.5mm or less [Wiring procedure] 1. Remove the front panel of the product. When lifting the front panel, be sure to hold the handle. 2.2 Installation 2 7 IDF100F~150F-W IDX-OM-M051 Air Dryer 2. Transportation and installation 2.

Platform Cylinder Series CXT

Q + Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

IZx-OMT0049

) Note 40) Note 40) Note 40) ION BALANCE OFF ON Display Ions are generated (green) Note 40) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 45) Note 44) Note 42) Note 43) Note 44) Note 44) OFF ON Product type IZTP41(green) IZTP42(blue) DAC/AC OFF ON Maintenance (green) NDL Note 47) Note 47) Note 47) Note 47) OFF ON Built-in sensor (green) SNSR Note 48) Note 48) Note 48