Model Type: ATEX, Category 2, Piping: Compression Fitting, Port Size: 10 [1" (25A)], Port Thread: NPT, Silencer: w/o Silencer, Pilot Port Size: 1/4", Orifice Diameter: Pilot Valve Orifice Diameter: for ø3mm to ø5mm

Series: 25A-LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, LECSA, Lead Screw: LEFS25: 6mm, LEFS32: 8mm, LEFS40: 10mm, Stroke: 800mm, Motor Option: w/Lock, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Cable Length: 2m

Series: 25A-LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, LECSA, Lead Screw: LEFS25: 6mm, LEFS32: 8mm, LEFS40: 10mm, Stroke: 350mm, Motor Option: -, Positioning Pin Hole: -, Actuator Cable Type: -, Cable Length: -

Series: 25A-PFMB7, Rated Flow Range: 201(2 to 200 L/min), Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: Out 1: NPN, Out 2: Analog 4 to 20mA, Lead Wire: Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber, Unit Specifications: -

Series: 25A-PFMB7, Rated Flow Range: 201(2 to 200 L/min), Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: Out 1: NPN, Out 2: NPN, Lead Wire: Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber, Unit Specifications: SI Unit Only

Series: 25A-PFMB7, Rated Flow Range: 201(2 to 200 L/min), Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: Out 1: NPN, Out 2: NPN, Lead Wire: Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber, Unit Specifications: SI Unit Only

(in) D (D1): 1, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

(in) D (D1): 1, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

(in) D (D1): 1, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 150, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PVDF, Size of Body: 6

(in) D (D1): 1, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

(in) D (D1): 1, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

(in) D (D1): 1, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

Air Cylinder Series MB

2) (n = 2, 4, 6, 8) 80 + 30 (n 2) (n = 2, 4, 6, 8) 90 + 30 (n 2) (n = 2, 4, 6, 8) 85 + 30 (n 2) (n = 2, 4, 6, 8) 70 + 30 (n 2) (n = 2, 4, 6, 8) n (Different surfaces) D-A44 70 + 50 (n 2) (n = 2, 4, 6, 8) 85 + 50 (n 2) (n = 2, 4, 6, 8) 90 + 50 (n 2) (n = 2, 4, 6, 8) 75 + 50 (n 2) (n = 2, 4, 6, 8) 80 + 50 (n 2) (n = 2, 4, 6, 8) n (Same surface) 1 70 75 80 85 90 2 (Different surfaces

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

side 55 75 n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, 35+30(n2) n=2, 3, 4, 80+30(n2) Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 80 75 90 10 1 Dif. sides Be sure to read before handling.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

side 55 75 35+30(n2) n=2, 3, 4, 80+30(n2) n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 10 80 75 90 1 Dif. sides Be sure to read before handling.

Multistage Ejector (N)ZL Series

-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx. 2900) 2-4.4 Mounting hole MULTISTAGE EJECTOR 76 52 8 27 178.5 5 4.5 Section A with digital vacuum pressure switch (40) (N)ZL212-E (ZSE4) (N)ZL212-EB (ZSE4B) (N)ZL212-EE (ZSE4E) (2) (1.6) 4-M5 x 0.8 Thread depth 6 (mounting hole) 73 87 12

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

HEC_W-E

When the temp. set in this item is reached, the alarm [ERR13] arises. 8-7 Operation 8.6.2 Setting mode, Level 2 F i n e C o n t r o l o f I n t e r n a l S e n s o r M O D E < 0 . 0 7 C 1. Fine Control of Internal Sensor Setting range : -9.99 to 9.99 C Min. increment : 0.01 C Indicated content : Fine adjusting value for internal temp.

Compact Rotary Actuator

u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i

HRX-OM-S004

OFF Press together OFF ( 0 . 7 i n ) Fig. 4-7 Alarm release 8. Repeat steps 1 to 4 to supply the circulating fluid to the users equipment and piping.