Digital Flow Switch (Remote type monitor unit)

Accumulated buttons simultaneously for 2 seconds or longer. flow displayed (flashing) : If the error cannot be reset after the above measures are taken, then please contact SMC. -35No.PF-OMG0008-F Specifications Specifications PF2A3 Model PF2A3 Applicable sensor PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)

Digital Flow Switch (Integrated display type) ( compatible)

1.3 to 10.6 0.9 to 14.5 125 to 1000 0 to 1372 100 L 2.6 to 26.4 1.9 to 37.0 100 to 1000 0 to 1400 250 L 13 to 66 5 to 92 200 to 1000 0 to 1400 Temperature value PD value Series Unit Flow Rated temperature Display/settable Rated temperature Display/settable range range range range range Min. to Max.

Digital Flow Switch (Integrated display type) ( compatible)

1.33 to 1060 0.92 to 14.50 125 to 1000 0 to 1372 100 L 2.6 to 26.4 1.9 to 37.0 100 to 1000 0 to 1400 250 L 13 to 66 5 to 92 200 to 1000 0 to 1400 Temperature value PD value Series Unit Flow Rated temperature Display/settable Rated temperature Display/settable range range range range range Min. to Max.

Process Pump

Since the marked point is below the curve (long dashed short dashed line) for 200 L/min (ANR), the maximum rate will be about 200 L/min (ANR). Caution 1. These flow rate characteristics are for fresh water (viscosity 1 mPas, specific gravity 1.0). 2.

DOC1003626

To use the power of the device, the total load current must be 200 mA or less. 2 Refer to 2.4.2 Contact output signal 4 to 6. 3 For option D With electrical conductivity control, it can be set. 2.2 Communication specification HRS400-A-46 2-2 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.2-3 / PIN No.

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

RS2H-OM0045P

. :200(Kg) 2. :20(m/min) 3. :0.5(MPa) 4. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

MHx-OMM0057

/ mm mm mm c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

This matches the controller. (1) LEG32MDGB-30 -4- 1.2 Specification Model LEG25 LEG32 LEG40 Horizonal (30,50 stroke, L=50 or less) Work load 20 45 60 kg*1 Vertical 24 27 27 Max.weight of transferred object[kg] *2 75 100 150 Pushing forceN*3*4*5 126 to 238 156 to 370 266 to 553 Actuator specifications Speedmm/s*5 18 to 250 24 to 200 24 to 150 Max.acceleration/decelerationmm/s2 5,000 Pushing

IDX-OM-W037

Reference data Reference Data 6.1 Specifications Item Specification IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 Fluid Compressed air Amount of air processed 100 to 500L/min (ANR) 200 to 800L/min (ANR) Inlet air temperature 5 to 40oC Inlet air pressure 0.3 to 1.0MPa Note 1) 2) Operating Ambient temperature 15 to 35oC (Relative humidity 85% or less) range Outlet air temperature adjustment

EXxx-OMQ0016

current. 3 [Inruch Current Filter] 0.1 ms Input filtering time [Filter_T] Sets the time to ignore the input signal change per unit. 20 ms 1.0 ms Selects the time for filtering. 1.0 ms 4 10 ms [Input Filtering Time] 1.0ms Input extension time [SigExt_T] Sets the time to hold the input signal per unit. 15 ms Selects the time to hold the input signal. 15 ms 5 100 ms [Input Extention Time] 200

PROFIBUS DP Compatible Fieldbus System

Transmission speed [kbps] 9.6 19.2 45.45 93.75 187.5 500 1500 3000 6000 12000 Cable length [m] 1200 1000 400 200 100 : Cable Type A specification Item Specification Impedance 135 to 165 Capacity 30 pF/m or less Loop resistance 110 /km Wire diameter 0.64 mm or more Core cross-section 0.34 mm2 or more Lower-level bus Item Specification Number of branches for input/output 4 branches (16 points

LV50-OMQ0004

The proof pressure is double the operating pressure range. -27No.LV50***-OMQ0004-F Analogue output Flow rate/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow rate[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -28No.LV50***-OMQ0004-F Dimensions Note)

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

ATX-OM-F004E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions Model HAA15-10 HAA22-14 PORT SIZE 1B union 11/2B union A 460 588 B 394 484 C 33 52 D 70 70 E 59 60 F 485 580 G 428 505 H 320 333 J 150 150 K 150 150 L 320 400 M 70 94 N 58 65 P 200 200 Q 480 610 R 220 220 S 225 238 HAA Series 6 4 1) Outer dimensions ATX-OM-F004E Air-Cooled Aftercooler

Series MLGP

. + = 4 . 1 = a V V 2 V m M E k 2 Ek: Kinetic energy (J) M : Mass of object being transported (kg) m : Mass of moving parts of cylinder (kg) V: Maximum speed (m/s) Va: Average speed (m/s) Mass of moving parts of cylinder (kg) Bore size Standard stroke (mm) (mm) model 20 25 30 40 50 75 100 125 150 175 200 250 300 350 MLGPM20 0.40 0.42 0.45 0.47 0.59 0.65 0.71 0.77 0.83 0.89 1.08 1.20 1.31

Regulator Valve

Option Rated voltage Voltage symbol Part no. 100 VAC 100V VK300-82-2-01 110 VAC 110V VK300-82-2-03 200 VAC 200V VK300-82-2-02 Note) When requiring a gauge different than that mentioned above, specify the model number. 220 VAC 220V VK300-82-2-04 Option is packed with it.

11-cq2-e

.: GR-S-010 (10 g) 72 Compact Cylinder/Large Bore Size: Double Acting, Single Rod Series CQ2 Replacement Procedure is 125, 140, 160 180, 200 P.290 Construction Standard Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !2 !3 !