80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

Solid State Vacuum Regulator

or less Current type Input impedance Approx. 6.5k Voltage type VAC OUT Tank Approx. 2.7k Preset input ITV2090 1 to 5VDC (load impedance: 1 k or more) Set pressure (Vacuum) Vacuum pump, Ejector Analog output 4 to 20mA (sink type) (load impedance: 250 or less) Output signal Note 3) (Monitor output) NPN open collector output: Max. 30V, 30mA Switch output PNP open collector output: Max. 30mA

PA3000/5000/PAX1000

and based on the proportional relationship to these lines, the pilot air pressure for this point is approximately 0.25MPa. 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air consumption 400 350 Air consumption l/min (ANR) SUP=0.5MPa Note 1) Even when switching cycles are changed for PA3000 with SUP=0.2MPa or PA5000 with SUP=0.2MPa or 0.3MPa, there is almost no change in the lifting height. 300 250

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa Supply pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) 0.4 Set pressure (MPa) Set pressure (MPa) 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 Courtesy of Steven

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

ZSE F/ISE

Yes 3 1/2 digit LED display (Sampling frequency: 5 times/sec) 2% F .S. 1 digit or less (Ambient temperature of 25 3C) Green LED (OUT1: Light up when ON), Red LED (OUT2: Light up when ON) No-voltage input (Solid state switch or reed switch), 5 ms or longer input IP65 Operating: 0 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating and stored: 35 to 85% RH (No condensation) 250

VXA21/22

0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Vacuum System Peripherals:

impedance ZU Approx. 6.5 k Voltage type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Approx. 2.7 k Preset input Right angle type cable connector Straight type cable connector ZL 1 to 5 VDC (Load impedance: 1 k or more) 4 to 20 mA (Sink type) (Load impedance: 250

VXA21/22

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 250 (2 1/2")

Magnet: None, Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 250 (2 1/2")

Magnet: None, Mounting: B (Through-hole), Bore Size: 250 (2 1/2"), Stroke: 250 (2 1/2"), Body Option: M (Male Rod End)