Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled.

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Slider Type/Ball Bushing Bearing

5 i y !7 e !0 u !8 !3 !4 #0 !1 o !2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

4/5 Port Air Operated Valve SYJA3000 Series

SYJA3 20 1 M3 Body ported Base mounted (4 port) (Manifold use only) SYJA3 30 2 Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port With sub-plate M5 3 position closed center Symbol 5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B)2 4(A) (B)2 4(A) 1

CJ2X/CUX/CQSX/CQ2X/CM2X

5 V, 12 V Terminal conduit Relay, PLC Yes 24 V 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit Lead wire length symbols: 0.5 mNil 3 m L 5 m Z None N (Example) C73C (Example) C73CL (Example) C73CZ (Example

CJ2X/CUX/CQSX/CQ2X/CM2X

pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

Pin Cylinders Series CJP2/CJP

Relay, PLC 24 V Yes Grommet 3-wire (NPN) IC circuit Diagnostic indication (2-color) 5 V, 12 V 3-wire (PNP) 12 V 2-wire A96V A96 IC circuit 5 V 3-wire (NPN equiv.)

Rotary Table/Vane Style Series MSU

MSUB1 (Single vane) MSUB1-S/SE 4 x M3 x 0.5 depth 5 2 x 4.5 through 2 x M4 x 0.7 depth 8 Long groove depth 5 (Positioning pin hole) 2 x 4.5 through +0.025 0 3 x 3H9 depth 5 Adjustment bolt 2 x 4.5 through Adjustment: Max. 5.75 A port B port 2 x M3 x 0.5 2 x M4 x 0.7 depth 8 Top ported: MSUB1-SE A port B port 2 x M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270

IDX-OM-U021

1 4.2.3 V) . 4-4 4.2.4 . 4-4 5 5.1 . 5-1 5.2 . 5-3 5.3 R ) . 5-4 6 6.1 . 6-1 6.2 GWP . 6-1 6.3 . 6-2 6.4 . 6-5 6.5 . 6-7 6.6 . 6-8 7 7.1 . 7-1 2 IDX-OM-U021 i i i-1 () 5.2 OFF i-1-1 3 IDF100150F i-1 i-1 IDX-OM-U021 i i-2 IDF100150F i-2 i-2 IDX-OM-U021 i i-2-1 i-2-2 i-2-3 50 i-2-4 IDF100150F i-2 i-3 IDX-OM-U021 i i-2-5 0 i-2-6 WARNING !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Direction Note) Values for 5 stations manifold with a 2 position single type valve.

Stainless Steel 316

(inch) Model NPT3/8 KQGT03-00 KQGT07-00 KQGT09-00 KQGT11-00 KQGT13-00 5/32 NPT1/4 3/8 1/4 NPT3/8 5/16 NPT3/8 1/2 3/8 NPT1/2 1/2 Straight Union Straight Union Union Y Union Y Applicable tubing O.D. (inch) Model Applicable tubing O.D.

DOC1003626

. 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14 Serial communication . 3

IDX-OM-X004

. 3 1 3 3 Shutdown . 3 2 3 4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5

o

B3T 11.81 1300) 2.28158) Lead wire length Stationsh) 2 4 5 6 10 t1 13 14 15 17 18 19 tn L1 (41.5) 2.O5 (s2) 2.46 (62.5)2.47 (73) 3.n (83.5) 3.70 (91) 4.11 (lo4.5) 4.53 fir5) 4.94 (i2s.s) (i361 5.77 (146.5) 6.18 (157) (167.5) 7.qr (178) 7.42 (188.5) 8.25 (2@5 j l2m) 9.07 (230.5 L2 1.32 (33.5)1.73 {44) 2.15 (54.5)2.56 (65) 2.97 (75.5)3.39 (86) 3.80 (96.5J 4.4 (107) 4.63 (1r75)5.O4 (la) rc8.8

o

B3T 11.81 1300) 2.28158) Lead wire length Stationsh) 2 4 5 6 10 t1 13 14 15 17 18 19 tn L1 (41.5) 2.O5 (s2) 2.46 (62.5)2.47 (73) 3.n (83.5) 3.70 (91) 4.11 (lo4.5) 4.53 fir5) 4.94 (i2s.s) (i361 5.77 (146.5) 6.18 (157) (167.5) 7.qr (178) 7.42 (188.5) 8.25 (2@5 j l2m) 9.07 (230.5 L2 1.32 (33.5)1.73 {44) 2.15 (54.5)2.56 (65) 2.97 (75.5)3.39 (86) 3.80 (96.5J 4.4 (107) 4.63 (1r75)5.O4 (la) rc8.8

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

AK ASS Flow Rate and Effective Area ASR JIS Symbol AS1001F AS2001F AS3001F AS2051F AS4001F Model ASF Metric size 8 6 8 6 10 3.2, 4, 6 4 10, 12 12 6 Tubing O.D. 3/16" 1/4" 1/8", 5/32" 1/4" 3/8" 1/2" 5/32" 3/16" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" Controlled flow (Free flow) Flow rate (/min (ANR)) 420 1050 130 290 660 1390 460 920 230 100 Effective area (mm 2) 6.5 16 2 4.5 10 21 7 14

Electric Actuator / Guide rod Slider

100 100 900mm 1000mm 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 Overhang direction:L3[mm] Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or

IDU/IDF

consumption (W) 790 815 750 880 10 Air cooled 870 900 870 1040 1520 1910 1650 1700 15 2290 2770 2340 2390 200 VAC 220 to 240VAC 220VAC 240VAC Circuit breaker (A) Note 3) 10 (for 100VAC), 5 (for 200VAC) Condenser Refrigerant Air connection Drain connection Auto drain JIS Symbol R134a R22 Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Rc 1/4 INA-20-41-04 Note 5) Refrigerated air dryer Air cooling aftercooler

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

B3T 11.81 1300) 2.28158) Lead wire length Stationsh) 2 4 5 6 10 t1 13 14 15 17 18 19 tn L1 (41.5) 2.O5 (s2) 2.46 (62.5)2.47 (73) 3.n (83.5) 3.70 (91) 4.11 (lo4.5) 4.53 fir5) 4.94 (i2s.s) (i361 5.77 (146.5) 6.18 (157) (167.5) 7.qr (178) 7.42 (188.5) 8.25 (2@5 j l2m) 9.07 (230.5 L2 1.32 (33.5)1.73 {44) 2.15 (54.5)2.56 (65) 2.97 (75.5)3.39 (86) 3.80 (96.5J 4.4 (107) 4.63 (1r75)5.O4 (la) rc8.8