Fieldbus system Ethernet POWERLINK compatible SI unit

Selects the time to hold the input signal. 15 ms 2: 100 ms 3: 200 ms 1: True (Auto) Error is automatically cleared when the short circuit is fixed.

EXxx-OMY0004

msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 Value for ON feedback delay time for Zone M 0 0 0 Reserved 0 0 1 Reserved 0 1 0 Reserved 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Output feedback for Zone M 0 Disable 1 Enable Bit 7 Reserved 55 No.EX##-OMY0004 Table 10-9 Byte2 Output feedback parameter zone 1 for Safety Mode (Module Passivation/xxx) Bit 2 Bit 1 Bit 0

EXxx-OMY0006CN

msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 ON 0 0 0 0 0 1 0 1 0 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Zone M Output feedback 0 Disable 1 Enable Bit 7 55 No.EX##-OMY0006CN Table 10-9 Safety Mode (Module Passivation/xxx)Byte2Zone 1 Output feedback parameter Bit 2 Bit 1 Bit 0 OFF Table 10-8 Bit 5 Bit 4 Bit 3 ON Table 10-8 Bit 6 Zone1 Output feedback

Digital Flow Switch

Item Specifications Conductor Nominal cross section AWG26 Outside diameter Approx. 1.00 mm Insulator Colours Brown, White, Black, Blue +0.10 Sheath Outside diameter 3.5 -0.25 -67No.PF-OMO0005-F Characteristics data Analogue output A B C Voltage output 1 V 1.04 V 5 V Current output 4 mA 4.16 mA 20 mA Model Minimum flow of rated flow range Maximum flow of rated flow range PFMB7201 2 L/min 200

PFxx-OMO0007CN

Max.30 V80 mA 1 V 2815 V 1 k 29420 mA 12 V300 24 V600 -40No.PF-OMO0007CN PF2A7--28--X560 PF2A7--68--X560 PF2A7--29--X560 PF2A7--69--X560 (15 V) (420 mA) 12 V 300 24 V 600 1 k 5F.S. 1 s A B 1 V 5 V 4 mA 20 mA 1 NL/min 10 NL/min PF2A710 3.5 CFM10 -2 35.0 CFM10 -2 5 NL/min 50 NL/min PF2A750 18 CFM10 -2 176 CFM10 -2 10 NL/min 100 NL/min PF2A711 3.5 CFM10 -1 35.5 CFM10 -1 20 NL/min 200

Digital Flow Switch (Remote type monitor unit)

Accumulated buttons simultaneously for 2 seconds or longer. flow displayed (flashing) : If the error cannot be reset after the above measures are taken, then please contact SMC. -35No.PF-OMG0008-F Specifications Specifications PF2A3 Model PF2A3 Applicable sensor PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)

Digital Flow Switch (Integrated display type) ( compatible)

1.3 to 10.6 0.9 to 14.5 125 to 1000 0 to 1372 100 L 2.6 to 26.4 1.9 to 37.0 100 to 1000 0 to 1400 250 L 13 to 66 5 to 92 200 to 1000 0 to 1400 Temperature value PD value Series Unit Flow Rated temperature Display/settable Rated temperature Display/settable range range range range range Min. to Max.

Digital Flow Switch (Integrated display type) ( compatible)

1.33 to 1060 0.92 to 14.50 125 to 1000 0 to 1372 100 L 2.6 to 26.4 1.9 to 37.0 100 to 1000 0 to 1400 250 L 13 to 66 5 to 92 200 to 1000 0 to 1400 Temperature value PD value Series Unit Flow Rated temperature Display/settable Rated temperature Display/settable range range range range range Min. to Max.

Process Pump

Since the marked point is below the curve (long dashed short dashed line) for 200 L/min (ANR), the maximum rate will be about 200 L/min (ANR). Caution 1. These flow rate characteristics are for fresh water (viscosity 1 mPas, specific gravity 1.0). 2.

DOC1003626

To use the power of the device, the total load current must be 200 mA or less. 2 Refer to 2.4.2 Contact output signal 4 to 6. 3 For option D With electrical conductivity control, it can be set. 2.2 Communication specification HRS400-A-46 2-2 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.2-3 / PIN No.

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

RS2H-OM0045P

. :200(Kg) 2. :20(m/min) 3. :0.5(MPa) 4. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

MHx-OMM0057

/ mm mm mm c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D

IDX-OM-W037

Reference data Reference Data 6.1 Specifications Item Specification IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 Fluid Compressed air Amount of air processed 100 to 500L/min (ANR) 200 to 800L/min (ANR) Inlet air temperature 5 to 40oC Inlet air pressure 0.3 to 1.0MPa Note 1) 2) Operating Ambient temperature 15 to 35oC (Relative humidity 85% or less) range Outlet air temperature adjustment

EXxx-OMQ0016

current. 3 [Inruch Current Filter] 0.1 ms Input filtering time [Filter_T] Sets the time to ignore the input signal change per unit. 20 ms 1.0 ms Selects the time for filtering. 1.0 ms 4 10 ms [Input Filtering Time] 1.0ms Input extension time [SigExt_T] Sets the time to hold the input signal per unit. 15 ms Selects the time to hold the input signal. 15 ms 5 100 ms [Input Extention Time] 200

PROFIBUS DP Compatible Fieldbus System

Transmission speed [kbps] 9.6 19.2 45.45 93.75 187.5 500 1500 3000 6000 12000 Cable length [m] 1200 1000 400 200 100 : Cable Type A specification Item Specification Impedance 135 to 165 Capacity 30 pF/m or less Loop resistance 110 /km Wire diameter 0.64 mm or more Core cross-section 0.34 mm2 or more Lower-level bus Item Specification Number of branches for input/output 4 branches (16 points

LV50-OMQ0004

The proof pressure is double the operating pressure range. -27No.LV50***-OMQ0004-F Analogue output Flow rate/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow rate[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -28No.LV50***-OMQ0004-F Dimensions Note)

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800