Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Type N A Rubber bumper, 20 to 100 Air cushion, 40 to 63 Nil Built-in magnet Clean series 10 11 Relief type Vacuum suction type No D With auto switch (Built-in magnet) Bore size (mm) 10 C D G 1 B N 40 150 Z M9BW 21 C D G 1 B N 40 150 Z M9BW Mounting Cylinder stroke (mm) B Auto switch Number of auto switches Basic Axial foot Rod

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

Sine Rodless Cylinder Series REBR Direct Mount Type

L V V B: Maximum speed Load weight chart> 100 REBHT32 REBH(T)25 10 Load weight W (kg) REBH15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 73 Series REBH Model Selection 3 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2+ 3 1 Load factor n 1 = W/Wmax Note Item Review W.

Magnetically Coupled Rodless Cylinder

to each bore size. 9 Series CY3B Magnetically Coupled Rodless Cylinder Basic Type Dimensions Basic type CY3B15 to 40 4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150

Digital Flow Switches

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

NCA1

4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order NC D A1 B 150 0400 N 0200 R XC10 Auto Switch Mounting Bore Stroke A Stroke B Dual Operation Double Rod Cushions Both Ends N w/o Cushions H Head End R Rod End Dimensions (in) Bore (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8

Table of Contents

Double acting 10 Single acting, Spring return 7-2-2 7-2-3 3 Mini-free Mount Cylinder Series CUJ 4, 6, 8, 10 How to Order Bore size 4 6 8 10 4 mm 6 mm 8 mm 10 mm 10 6 D CUJ B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without auto switch D 10 CDUJ B 6 F8N S With

High Power Cylinder:

2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area So (mm2)

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

47 4.6 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (108.5) 10 A B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side

2–4

Variations Standard stroke (mm) Series Bore size (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber cushion CQM 32, 40 50 Compact Cylinder/Guide Rod Type 12, 16, 20, 25, 32, 40, 50 Series CQM How to Order Without auto switch B 20 10 CQM B 20 10 M9B S CDQM With auto switch With auto switch Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc

MU

25 10 S M CQS J79W S B 25 10 S M MDU With auto switch CQM CQ2 Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Mounting style RQ Nil S n 2 pcs. 1 pc. n pcs.

MU

Without auto switch MUW B 25 30 D M MDUW J79W S B 25 30 D M With auto switch Built-in magnet Number of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

C95

D-F5BAL D-F5 D-J5 D-A5/D-A6 D-A59W D-F5NTL Bore size Bore size (mm) (mm) A Ht B Hs A Ht Hs A B A B A B B 10.5 24.5 0 35 14.5 25 32 32 32.5 17 2 21 4.5 22 8.5 9.5 21.5 27.5 0 38.5 25.5 27.5 40 40 36.5 28 2 32 4.5 33 8.5 9.5 23 34.5 0 43.5 27 34 50 50 41 29.5 2.5 33.5 5 34.5 9 10 28 39.5 0 48.5 32 39 63 63 46 34.5 2.5 38.5 5 39.5 9 10 28 46.5 2.5 55 22 46.5 80 80 52.5 24.5 6.5 28.5 9 29.5

HRX-OM-Q026

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 8 Filter Rc1 20m Refer to the table below * Recommended filters for facility water inlet Applicable model Recommended filter HRSH100/150 FQ1012N-10-T020-B-X61 Note HRSH200/250 FGESA-10-T020A-G2 Note Note) The filter shown above cannot be directly connected to the thermo-chiller.

10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

Direct Solenoid

Th cov6r cannot b rotabd on iha bodv, OBINGMANIFOLD MOUNTING PATTEBN PIPETAPIS I/E'NPTFOT 1/4" NPTF AS SPECINED BYMODEL NUMgER DIMENSIONS A B c D E F G H J K M N P R s 5.4 (128) 2.40 (61) 1.77 (4s) 0.94 (211 0.24 (6) o.a1 (8) 228 (58) 0.8:l (211 2.13 (54) o.a7 (221 1.06 en 0.98 (25) 0.39 (10) 0.79 (20) 0.98 (25) Millimeters In Parentheses PARTS LIST O.ldl n t Noi.qt rYa 316 1 Eody Al3rnbly-ri

70pvpump

T, F, N are options.