XL-OMY0001

-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

MLGC

style. 3.2-10

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

CEx-OMQ0011

(ON ON ON (LED)No.10() Err9 (P3)(P2) () Err9 Err9 ON ON ON ()5mm Err5 5mm 1 Err10: Err11 CPU Err12 ON 13-2 () 200 200 ( 6) 57 *200.0 PRG STEP P6 200.0 200 200 300mm/sec 50% 35% 58 141 No. No.

RHC

9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65

7ND9071en

mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

5 0.5 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

5 0.5 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

VCL

to 60 (No freezing) 10 to 100 Dusttight, Low jetproof (equivalent to IP65) Enclosure VDW Environment Location without corrosive or explosive gases VQ Valve leakage (cm3/min) 0 (with oil pressure) Mounting orientation Unrestricted VX2 (3) 30/150 or less Vibration/Impact resistance (m/s2) 24, 12 VDC, 100, 110, 200, 220, 230 VAC (50/60 Hz) 100, 200, 220, 230 VAC (50/60 Hz) VX Rated voltage

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

Series AP3500

thread (2 each) Sides (2 each) Bottom mount 0.06 in3 (1.07 cm3) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Adjustable range of metered flow 2) 10 to 200 slpm 10 to 350 slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

VCHC ASD230FG ASD330FG ASD430FG ASR ASQ 100 200 400 07,08,09,10,11 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG ASD530FG ASD630FG 1500 1000 10,11 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 10,11,12 08,09 1000 500 06,07

JXCx-OMT0030CN

200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 9.CN2:TB/PC 22 - 6CN 61 1 EMG+ EMG 2 EMGEMG 3 24V + 5 4 3 2 1 4 0V 5 FG FG LEC UL , UL1310 Class2 62 AWG20 (24V0V) 60 EMG AWG20 EMG+,EMG60 8mm 23 - D (100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC) (LEC)EMG+,EMG-OPEN 24 - (

ZSE1/ISE1

(Variable) 3% F .S. or less (Fixed) 1 to 10% of set prss. (Variable) 1 to 10% of set press. (Adjustable) Hysteresis Data ON: when output is ON (Red) ON: when output is ON (Red) ON: when output is ON (OUT1: Red, OUT2: Green) Indicator light Trimmer adjustment 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees None 1 to 5 V 5% F .S.

180

-4 kgm2) Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 500 1.0 4 400 0.8 3 300 0.6 2 200 0.4 1 100 0.2 0 0 0 0.1 0.2 0.4 0.5 0.3 0.1 0.2 0.3 0.2 0.4 0.6 0.8 1.0 1.2 MHZ Operating time (s/90) Operating time (s/90) Operating time (s/90) MHY2-16D MHW2-25D MHF 3.0 20 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 2.5 MHL 15 2.0 MHR 10 1.5 MHK 1.0 5 0.5 MHS

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

1.0 1.1 2.2 1.3 2.5 4.6 3.2 MY2H MTS For 100 mm stroke cylinder MY CY1H Available bore sizes 10, 15, 25 CY CY1H CY1F MG Standard stroke (mm) Maximum stroke Cushion Piping directions Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated piping on right 28 34 46 46 63 198 225 205 294 260 DBuilt-in shock absorber 39.5 CY1F 15 750 Concentrated piping on left -X 25 1200 Overall length reduced by 22% compared to Series MY2H 20Magnetically coupled rodless