Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

XG_-OMV0028

MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93) FKM AM350(), :A6063, :A5052P, :A5052, :SUS304 Rc1/8 () 0.2 kg 20 *1 *2, 4 - 2.

MONOSASHI-KUN

Cylinder Specifications 10 3-2. Sensor Specifications 10 3-3. Allowable Kinetic Energy 11 3-3-1. Allowable Kinetic Energy 11 3-3-2. Mass of Cylinder Movable Parts11 3-3-3. Load mass and Piston Speed 11 4. Wiring 4-1. Connector Wiring Table 12 4-2. Wiring for Counter 12 4-3. Noise countermeasures 12 5. Structure and Measuring Principle 5-1. Structure 13 5-2.

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

ambient humidity 35 to 95%RH Lever RSG Residual voltage Note 1) 3 V or less Withstand voltage Note 2) Lever detection switch 1000 VAC RS2H RS2H Endurance 10 to 55 Hz, Double amplitude 1.5 mm X, Y, Z direction each 2 h Vibration RSH Tightening nut Endurance 500 m/s2 (approx. 50 G), X, Y, Z direction each 10 times MIW MIS Impact IEC standards IP67 (Immersion proof and oil proof by JEM standards

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

CEx-OMB0075

A-phase pulse B-phase pulse 11 12 11 10 10 Count multiplier In rod extending direction, A-phase turns on first, then B-phase turns on with the delay of In rod retracting direction, B-phase turns on first, then A-phase turns on with the delay of approximately 90 phase difference. approximately 90 phase difference. Counter performs addition in and does subtraction in .

Series 11-MXJ ø4, ø6, ø8 Air Slide Table

Bore size (Standard stroke (mm)) Bore size 4.5 6 8 Symbol 4 6 8 Stroke 5, 10 5, 10, 15 5, 10, 15, 20 Auto switch Nil Without auto switch (Built-in magnet) Adjuster option For the applicable auto switch models, refer to the table below.

Cylinder with Turntable ø63, ø80, ø100 Series MGT

A96 A93 A90 5 V Yes IC circuit Individual -X Grommet No 2-wire 100 V Relay, PLC 24V 12 V IC circuit 100 V or less Solid state auto switches marked are produced upon receipt of order.

High Vacuum Slit Valve

Specifications Opening angle 50mm336mm Working pressure Pa Atmospheric pressure to 10-6 Operating pressure MPa 0.45 to 0.6 Internal leakage amount O-ring material : FKM 6.510-10 Pam3/sec O-ring material : Kalrez 6.510-9 Pam3/sec C O-ring material : FKM 6.510-8 Pam3/sec Internal leakage amount (At negative pressure 0.1MPa or less) O-ring material : Kalrez 6.510-7 Pam3/sec C External leakage

3-Position Rotary Table MSZ Series Size: 10, 20, 30, 50

3-Position Rotary Table MSZ Series Size: 10, 20, 30, 50 CRB2 How to Order CRB1 MSU MSZA A M9BW 10 High precision type CRJ MSZB A M9BW 10 Basic type CRA1 Number of auto switches CRQ2 Nil n 2 pcs. n pcs.

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

CEP112 CEP120 CEP1L12 CEP1F12 CEP1F20 CE1 R 05 Extension cable CEP1L20 Cable length Suffix 05 10 15 20 5 m 10 m 15 m 20 m Extension cable Extension cable & connector Nil C Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

(N) MGC Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Symbol Description Bore size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Side porting type -X867 MGF 283 188 314 251 220 157 126 94 63 OUT 314 20 Made to Order (For details, refer to pages 1247 to 1440.) 10 188 118 236 212 165 141 94 71 47 IN 236 MGZ 98 491 442 393 344 295 245 196 147 491 OUT 25 10 Symbol Description

Bearing Type: L (Ball Bushing), Bore Size: 20mm, Port Thread: Rc; Bore Size 12, 16: M5 x 0.8, Stroke: 75mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Environmental Options: XC35 (w/Coil Scrapper)

Magnet: D (Built-in Magnet), Mounting: B (Basic, Double-side Bossed), Bore: 25mm, Port Thread: Rc, Stroke: 75mm, Cushion: None, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in), Mounting: A (Bottom Mounting Style), Bore Size: 20mm, Port Thread: Rc, Stroke: 75mm, Rod End Thread: Male Rod Thread, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in), Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 40mm, Port Thread: Rc, Stroke: 75mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in), Type: Pneumatic, Mounting: C (Single Clevis), Bore: 32mm, Port Thread: Rc, Stroke: 75mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: Built-in, Mounting: Rod Flange, Bore: 16mm, Stroke: 75mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.