Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

CL

12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86

Speed Controller with One-touch Fittings Series AS In-line Type 1

(g) 6 20.7 23.5 4.5 38 8.4 1/8" AS1001F-01 AS1001F-23 6 20.7 23.5 4.5 38.0 8.4 3.2 12.7 10 12.7 10 7 21.4 24.2 5.2 39.2 9.3 5/32" AS1001F-03 AS1001F-04 7 21.4 24.2 5.2 39.2 9.3 4 12 48.7 11.4 16.5 3/16" AS1001F-05 AS1001F-06 8 22.4 25.2 6.2 40.7 11.6 6 13.5 10 6.2 25.2 22.4 9 40.7 12 13.7 1/4" AS1001F-07 AS2001F-04 12 27.6 32.6 5.2 40.7 9.3 4 12.7 11.8 12 27.6 32.6 5.2 40.7 9.3 12.7 5/32"

Compact Cylinder with Air Cushion Series RQ

L d m t D d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft 21 25.6 41.6 50.6 7.6 9.6 9.6 13.4 16.2 20.2 36.2 44.2 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 20 25 32, 40 50 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 5 6 8 11 13 17 22 27 15.0 19.6 25.4 31.2 IY-G02 IY-G03 IY-G04 IY-G05 NT-02 NT-03 NT-04 NT-05 8 10 10 14 0.040 0.076 0.040 0.076 0.040 0.076 0.050

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 With One-touch fittings Use 1/8" tube. 15-9-72 2 Speed Controller with One-touch Fittings Panel Mount Type, In-line Type Needle Valve/Flow Characteristics AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR))

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 With One-touch fittings Use 1/8" tube. 2 Speed Controller with One-touch Fittings Panel Mount Type, In-line Type Needle Valve/Flow Characteristics AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

RQ

Example) Bolt M5 x 50l 4 pcs.

Compact Cylinder with Air Cushion Series RQ

L d m t NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 0.040 0.076 0.040 0.076 0.040 0.076 20 8 IY-G02 C8 type for pivot 21 7.6 16.2 1.5 0.9 25 10 IY-G03 C10 type for pivot 25.6 9.6 20.2 1.55 1.15 32,40 10 IY-G04 C10 type for pivot 41.6 9.6 36.2 1.55 1.15 0.050 0.093 0.050 0.093

VCW

) 10 is available only for N.C.

AS-FM

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AK Ex.) AS1201FM-M5-23-X12 Ex.)

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

Modular Type Lubricator Series AL

20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

ZQ-OM01301

ZQ-OM01301-A 9 Clamping rod assembly (2 pcs. are included in one set) ZQ1-SR1-04-A (1) Number of stations 01 1 stations (1) 02 2 stations 08 8 stations 10 Sound absorbing material (for manifold ) (2 pcs. are included in one set) ZQ1-SE2-A 11 Silencer block assembly (2 pcs. are included in one set) ZQ1-SC1-A 12 Ejector body gasket for manifold (10 pcs. are included in one set) ZQ-3-005-10AS

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 male -M3 male M-3N P. 92 M5 M5 M-5ALHN-6 P. 91 Bulkhead union M-5E 6/4 P.90 Panel mount connection. M5 female -M5 female Plug Barb elbow(H) For soft nylon tube. Body rotates at 360 around the stud axis. 3.18/2.18 M-5ALHU-3 To plug unused M3 port.

Stations: 04, Port: M3 (M3 x 0.5)

Stations: 04, Port: M3 x 0.5

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller, One Touch, FLOW CONTROL, 10 lb